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\bibitem{Stuer_etal2001} {\textquotedblleft}\textit{Characterisation of the local stress induced by shallow trench isolation and CoSi2 silicidation}{\textquotedblright}. Stuer C, Steegen A, van Landuyt J, Bender H, Maex K, Institute of physics conference series , 481 (2001)

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