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\bibitem{Yan_etal2000} {\textquotedblleft}\textit{Spatial behavior of energy relaxation of electrons in capacitively coupled discharges: comparison between Ar and SiH$_{4}$}{\textquotedblright}. Yan M, Bogaerts A, Gijbels R, Goedheer WJ, Journal of applied physics \textbf{87}, 3628 (2000).   http://doi.org/10.1063/1.372392

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