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\bibitem{Tinck_etal2008} {\textquotedblleft}\textit{Simulation of an Ar/Cl$_{2}$ inductively coupled plasma: study of the effect of bias, power and pressure and comparison with experiments}{\textquotedblright}. Tinck S, Boullart W, Bogaerts A, Journal of physics: D: applied physics \textbf{41}, 065207 (2008).   http://doi.org/10.1088/0022-3727/41/6/065207

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