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\bibitem{Tokei_etal2002} {\textquotedblleft}\textit{Reliability of copper dual damascene influenced by pre-clean}{\textquotedblright}. Tokei Z, Lanckmans F, van den Bosch G, Van Hove M, Maex K, Bender H, Hens S, van Landuyt J, Analysis Of Integrated Circuits , 118 (2002).   http://doi.org/10.1109/IPFA.2002.1025629

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