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\bibitem{Bultinck_etal2009} {\textquotedblleft}\textit{Particle-in-cell/Monte Carlo collisions model for the reactive sputter deposition of nitride layers}{\textquotedblright}. Bultinck E, Mahieu S, Depla D, Bogaerts A, Plasma processes and polymers \textbf{6}, S784 (2009).   http://doi.org/10.1002/ppap.200931904

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