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\bibitem{Yusupov_etal2011} {\textquotedblleft}\textit{Behavior of electrons in a dual-magnetron sputter deposition system : a Monte Carlo model}{\textquotedblright}. Yusupov M, Bultinck E, Depla D, Bogaerts A, New journal of physics \textbf{13}, 033018 (2011).   http://doi.org/10.1088/1367-2630/13/3/033018

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