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\bibitem{Gou_etal2010} {\textquotedblleft}\textit{Molecular dynamics simulations of Cl$^{+}$ etching on a Si(100) surface}{\textquotedblright}. Gou F, Neyts E, Eckert M, Tinck S, Bogaerts A, Journal of applied physics \textbf{107}, 113305 (2010).   http://doi.org/10.1063/1.3361038

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