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\bibitem{Jian-Ping_etal2010} {\textquotedblleft}\textit{Molecular dynamics simulation of temperature effects on CF(3)(+) etching of Si surface}{\textquotedblright}. Jian-Ping N, Xiao-Dan L, Cheng-Li Z, You-Min Q, Ping-Ni H, Bogaerts A, Fu-Jun G, Wuli xuebao \textbf{59}, 7225 (2010)

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