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\bibitem{Berezhnoi_etal1999} {\textquotedblleft}\textit{Modelling of radio frequency capacitively coupled plasma at intermediate pressures}{\textquotedblright}. Berezhnoi S, Kaganovich I, Bogaerts A, Gijbels R Kluwer Academic, Dordrecht, page 525 (1999).

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