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\bibitem{Depla_etal2004} {\textquotedblleft}\textit{Modeling of the target surface modification by reactive ion implantation during magnetron sputtering}{\textquotedblright}. Depla D, Chen ZY, Bogaerts A, Ignatova V, de Gryse R, Gijbels R, Journal of vacuum science and technology: A: vacuum surfaces and films \textbf{22}, 1524 (2004).   http://doi.org/10.1116/1.1705641

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