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\bibitem{Ignatova_etal2005} {\textquotedblleft}\textit{Interpretation of TOF-SIMS depth profiles from ultrashallow high-\textbf{k} dielectric stacks assisted by hybrid collisional computer simulation}{\textquotedblright}. Ignatova VA, M{\"o}ller W, Conard T, Vandervorst W, Gijbels R, Applied physics A : materials science \& processing \textbf{81}, 71 (2005).   http://doi.org/10.1007/s00339-005-3239-8

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