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\bibitem{Lebedev_etal1997} {\textquotedblleft}\textit{HREM study of ion implantation in 6H-SiC at high temperatures}{\textquotedblright}. Lebedev OI, Van Tendeloo G, Suvorova AA, Usov IO, Suvorov AV, Journal of electron microscopy \textbf{46}, 271 (1997)

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