%&LaTeX
\documentclass{article}

\usepackage[utf8]{inputenc}
\usepackage[T1]{fontenc}
\usepackage{textcomp}

\begin{document}

\begin{thebibliography}{1}

\bibitem{Tinck_etal2014} {\textquotedblleft}\textit{Formation of a nanoscale SiO$_{2}$ capping layer on photoresist lines with an Ar/SiCl$_{4}$/O$_{2}$ inductively coupled plasma : a modeling investigation}{\textquotedblright}. Tinck S, Altamirano-S{\'a}nchez E, De Schepper P, Bogaerts A, Plasma processes and polymers \textbf{11}, 52 (2014).   http://doi.org/10.1002/ppap.201300062

\end{thebibliography}

\end{document}

