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Frangis, N.; van Landuyt, J.; Grimaldi, M.G.; Calcagno, L. Electron microscopy and Rutherford backscattering spectrometry characterisation of 6H SiC samples implanted with He+ 1996 Nuclear instruments and methods in physics research: B: beam interactions with materials and atoms T2 – Symposium 1 on New Trends in Ion Beam Processing of Materials, at the, E-MRS 96 Spring Meeting, June 04-07, 1996, Strasbourg, France 120 2 UA library record; WoS full record; WoS citing articles doi
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