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  Author Title Year (down) Publication Volume Times cited Additional Links Links
Ishikawa, K.; Karahashi, K.; Ichiki, T.; Chang, J.P.; George, S.M.; Kessels, W.M.M.; Lee, H.J.; Tinck, S.; Um, J.H.; Kinoshita, K. Progress and prospects in nanoscale dry processes: How can we control atomic layer reactions? 2017 Japanese journal of applied physics 56 18 UA library record; WoS full record; WoS citing articles pdf url doi
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