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  Author Title Year (down) Publication Volume Times cited Additional Links Links
Vereecke, G.; De Coster, H.; Van Alphen, S.; Carolan, P.; Bender, H.; Willems, K.; Ragnarsson, L.-A.; Van Dorpe, P.; Horiguchi, N.; Holsteyns, F. Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors 2018 Microelectronic engineering 200 UA library record; WoS full record; WoS citing articles pdf doi
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