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Author |
Title |
Year  |
Publication |
Volume |
Times cited |
Additional Links |
Links |
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Kaganovich, I.; Misina, M.; Berezhnoi, S.; Gijbels, R. |
Electron Boltzmann kinetic equation averaged over fast electron bouncing and pitch-angle scattering for fast modeling of electron cyclotron resonance discharge |
2000 |
Physical review : E : statistical, nonlinear, and soft matter physics |
61 |
31 |
UA library record; WoS full record; WoS citing articles |
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Berezhnoi, S.; Kaganovich, I.; Misina, M.; Bogaerts, A.; Gijbels, R. |
Semianalytical description of nonlocal secondary electrons in a radio-frequency capacitively coupled plasma at intermediate pressures |
1999 |
IEEE transactions plasma science |
27 |
7 |
UA library record; WoS full record; WoS citing articles |
|
|
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Berezhnoi, S.; Kaganovich, I.; Bogaerts, A.; Gijbels, R. |
Modelling of radio frequency capacitively coupled plasma at intermediate pressures |
1999 |
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UA library record; WoS full record; |
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