“Janus Gold Nanoparticles Obtained via Spontaneous Binary Polymer Shell Segregation”. Percebom AMM, Giner-casares JJ, Claes N, Bals S, Loh W, Liz-Marzan LM, Chemical communications 52, 4278 (2016). http://doi.org/10.1039/C5CC10454H
Abstract: Janus gold nanoparticles are of high interest because they allow directed self-assembly and display plasmonic properties. We succeeded in coating gold nanoparticles with two different polymers that form a Janus shell. The spontaneous segregation of two immiscible polymers at the surface of the nanoparticles was verified by NOESY NMR and most importantly by electron microscopy analysis in two and three dimensions. The Janus structure is additionally shown to affect the aggregation behavior of the nanoparticles.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 6.319
Times cited: 44
DOI: 10.1039/C5CC10454H
|
“High viscosity to highly dispersed PtPd bimetallic nanocrystals for enhanced catalytic activity and stability”. Ying J, Hu Z-Y, Yang X-Y, Wei H, Xiao Y-X, Janiak C, Mu S-C, Tian G, Pan M, Van Tendeloo G, Su B-L, Chemical communications 52, 8219 (2016). http://doi.org/10.1039/c6cc00912c
Abstract: A facile high-viscosity-solvent method is presented to synthesize PtPd bimetallic nanocrystals highly dispersed in different mesostructures (2D and 3D structures), porosities (large and small pore sizes), and compositions (silica and carbon). Further, highly catalytic activity, stability and durability of the nanometals have been proven in different catalytic reactions.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 6.319
Times cited: 19
DOI: 10.1039/c6cc00912c
|
“Disentangling the effect of seed size and crystal habit on gold nanoparticle seeded growth”. González-Rubio G, de Oliveira TM, Altantzis T, La Porta A, Guerrero-Martínez A, Bals S, Scarabelli L, Liz-Marzán LM, Chemical communications 53, 11360 (2017). http://doi.org/10.1039/C7CC06854A
Abstract: Oxidative etching was used to produce gold seeds of different sizes and crystal habits. Following detailed characterization, the seeds were grown under different conditions. Our results bring new insights toward understanding the effect of size and crystallinity on the growth of anisotropic particles, whilst identifying guidelines for the optimisation of new synthetic protocols of predesigned seeds.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 6.319
Times cited: 29
DOI: 10.1039/C7CC06854A
|
“The design of magneto-plasmonic nanostructures formed by magnetic Prussian Blue-type nanocrystals decorated with Au nanoparticles”. Sanchis-Gual R, Susic I, Torres-Cavanillas R, Arenas-Esteban D, Bals S, Mallah T, Coronado-Puchau M, Coronado E, Chemical Communications 57, 1903 (2021). http://doi.org/10.1039/D0CC08034A
Abstract: We have developed a general protocol for the preparation of hybrid nanostructures formed by nanoparticles (NPs) of molecule-based magnets based on Prussian Blue Analogues (PBAs) decorated with plasmonic Au NPs of different shapes. By adjusting the pH, Au NPs can be attached preferentially along the edges of the PBA or randomly on the surface. The protocol allows tuning the plasmonic properties of the hybrids in the whole visible spectrum.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 6.319
Times cited: 5
DOI: 10.1039/D0CC08034A
|
“Polydopamine nanocoated whole-cell asymmetric biocatalysts”. Wang L, Hu Z-Y, Yang X-Y, Zhang B-B, Geng W, Van Tendeloo G, Su B-L, Chemical communications 53, 6617 (2017). http://doi.org/10.1039/C7CC01283G
Abstract: Our whole-cell biocatalyst with a polydopamine nanocoating shows high catalytic activity (5 times better productivity than the native cell) and reusability (84% of the initial yield after 5 batches, 8 times higher than the native cell) in asymmetric reduction. It also integrates with titania, silica, and magnetic nanoparticles for multi-functionalization.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 6.319
Times cited: 15
DOI: 10.1039/C7CC01283G
|
“Optical encoding of luminescent carbon nanodots in confined spaces”. Bartholomeeusen E, De Cremer G, Kennes K, Hammond C, Hermans I, Lu J-B, Schryvers D, Jacobs PA, Roeffaers MBJ, Hofkens J, Sels BF, Coutino-Gonzalez E, Chemical Communications 57, 11952 (2021). http://doi.org/10.1039/D1CC04777A
Abstract: Stable emissive carbon nanodots were generated in zeolite crystals using near infrared photon irradiation gradually converting the occluded organic template, originally used to synthesize the zeolite crystals, into discrete luminescent species consisting of nano-sized carbogenic fluorophores, as ascertained using Raman microscopy, and steady-state and time-resolved spectroscopic techniques. Photoactivation in a confocal laser fluorescence microscope allows 3D resolved writing of luminescent carbon nanodot patterns inside zeolites providing a cost-effective and non-toxic alternative to previously reported metal-based nanoclusters confined in zeolites, and opens up opportunities in bio-labelling and sensing applications.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 6.319
DOI: 10.1039/D1CC04777A
|
“Hierarchical zeolites containing embedded Cd0.2Zn0.8S as a photocatalyst for hydrogen production from seawater”. Yuan Y, Wu F-J, Xiao S-T, Wang Y-T, Yin Z-W, Van Tendeloo G, Chang G-G, Tian G, Hu Z-Y, Wu S-M, Yang X-Y, Chemical communications 59, 7275 (2023). http://doi.org/10.1039/D3CC01409F
Abstract: Uncovering an efficient and stable photocatalytic system for seawater splitting is a highly desirable but challenging goal. Herein, Cd0.2Zn0.8S@Silicalite-1 (CZS@S-1) composites, in which CZS is embedded in the hierarchical zeolite S-1, were prepared and show remarkably high activity, stability and salt resistance in seawater.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 4.9
DOI: 10.1039/D3CC01409F
|
“Bundles of identical double-walled carbon nanotubes”. Colomer J-F, Henrard L, Launois P, Van Tendeloo G, Lucas AA, Lambin P, Chemical communications , 2592 (2004). http://doi.org/10.1039/b410930a
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 6.319
Times cited: 13
DOI: 10.1039/b410930a
|
“Heat-induced transformation of CdSe-CdS-ZnS coremultishell quantum dots by Zn diffusion into inner layers”. Yalcin AO, Goris B, van Dijk-Moes RJA, Fan Z, Erdamar AK, Tichelaar FD, Vlugt TJH, Van Tendeloo G, Bals S, Vanmaekelbergh D, Zandbergen HW, van Huis MA;, Chemical communications 51, 3320 (2015). http://doi.org/10.1039/C4CC08647C
Abstract: In this work, we investigate the thermal evolution of CdSeCdSZnS coremultishell quantum dots (QDs) in situ using transmission electron microscopy (TEM). Starting at a temperature of approximately 250 °C, Zn diffusion into inner layers takes place together with simultaneous evaporation of particularly Cd and S. As a result of this transformation, CdxZn1−xSeCdyZn1−yS coreshell QDs are obtained.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 6.319
Times cited: 21
DOI: 10.1039/C4CC08647C
|
“Lewis base mediated efficient synthesis and solvation-like host-guest chemistry of covalent organic framework-1”. Kalidindi SB, Wiktor C, Ramakrishnan A, Weßing J, Schneemann A, Van Tendeloo G, Fischer RA, Chemical communications 49, 463 (2013). http://doi.org/10.1039/c2cc37183a
Abstract: N-Lewis base mediated room temperature synthesis of covalent organic frameworks (COFs) starting from a solution of building blocks instead of partially soluble building blocks was developed. This protocol shifts COF synthetic chemistry from sealed tubes to open beakers. Non-conventional inclusion compounds of COF-1 were obtained by vapor phase infiltration of ferrocene and azobenzene, and solvation like effects were established.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 6.319
Times cited: 17
DOI: 10.1039/c2cc37183a
|
“Molecular sieve properties of mesoporous silica with intraporous nanocarbon”. de Clippel F, Harkiolakis A, Ke X, Vosch T, Van Tendeloo G, Baron GV, Jacobs PA, Denayer JFM, Sels BF, Chemical communications 46, 928 (2010). http://doi.org/10.1039/b918864a
Abstract: Biporous carbonsilica materials (CSM) with molecular sieve properties and high sorption capacity were developed by synthesizing nano-sized carbon crystallites in the mesopores of Al-MCM-41.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 6.319
Times cited: 21
DOI: 10.1039/b918864a
|
“Octahedral-shaped perovskite nanocrystals and their visible-light photocatalytic activity”. Yin S, Tian H, Ren Z, Wei X, Chao C, Pei J, Li X, Xu G, Shen G, Han G, Chemical communications 50, 6027 (2014). http://doi.org/10.1039/c4cc01118j
Abstract: Octahedral-shaped perovskite PbTiO3 nanocrystals (PT OCT) with well-defined {111} facets exposed have been successfully synthesized via a facile hydrothermal method by using LiNO3 as an ion surfactant. The Li-O bond on the surface of PT OCT nanocrystals is essential to the stability of such nanocrystals and also results in a dramatic high visible-light photocatalytic activity.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 6.319
Times cited: 19
DOI: 10.1039/c4cc01118j
|
“Positive graphene by chemical design : tuning supramolecular strategies for functional surfaces”. Hadad C, Ke X, Carraro M, Sartorel A, Bittencourt C, Van Tendeloo G, Bonchio M, Quintana M, Prato M, Chemical communications 50, 885 (2014). http://doi.org/10.1039/c3cc47056c
Abstract: A diazonium based-arylation reaction was efficiently used for the covalent addition of 4-amino-N,N,N-trimethylbenzene ammonium to stable dispersions of few layer graphene (FLG) yielding an innovative FLG platform with positive charges to immobilize inorganic polyanions.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 6.319
Times cited: 19
DOI: 10.1039/c3cc47056c
|
“Post-synthesis deposition of V-Zeolitic nanoparticles in SBA-15”. Meynen V, Beyers E, Cool P, Vansant EF, Mertens M, Weyten H, Lebedev OI, Van Tendeloo G, Chemical communications , 898 (2004). http://doi.org/10.1039/b400636d
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT); Laboratory of adsorption and catalysis (LADCA)
Impact Factor: 6.319
Times cited: 22
DOI: 10.1039/b400636d
|
“Production of large graphene sheets by exfoliation of graphite under high power ultrasound in the presence of tiopronin”. Quintana M, Grzelczak M, Spyrou K, Kooi B, Bals S, Van Tendeloo G, Rudolf P, Prato M, Chemical communications 48, 12159 (2012). http://doi.org/10.1039/c2cc35298b
Abstract: Under ultrasonication, the production of high quality graphene layers by exfoliation of graphite was achieved via addition of tiopronin as an antioxidant.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 6.319
Times cited: 39
DOI: 10.1039/c2cc35298b
|
“A protecting group approach toward synthesis of Au-silica Janus nanostars”. Rodríguez-Fernández D, Altantzis T, Heidari H, Bals S, Liz-Marzan LM, Chemical communications 50, 79 (2014). http://doi.org/10.1039/c3cc47531j
Abstract: The concept of protecting groups, widely used in organic chemistry, has been applied for the synthesis of Au-silica Janus stars, in which gold branches protrude from one half of Au-silica Janus spheres. This configuration opens up new possibilities to apply the plasmonic properties of gold nanostars, as well as a variety of chemical functionalizations on the silica component.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 6.319
Times cited: 26
DOI: 10.1039/c3cc47531j
|
“Selective organic functionalization of graphene bulk or graphene edges”. Quintana M, Montellano A, Esau del Rio Castillo A, Van Tendeloo G, Bittencourt C, Prato M, Chemical communications 47, 9330 (2011). http://doi.org/10.1039/c1cc13254g
Abstract: Graphene sheets have been functionalized with a PAMAM dendron, finding that graphene can be efficiently functionalized all over the surface, or only at the edges, depending on the reactions used in the functionalization process.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 6.319
Times cited: 84
DOI: 10.1039/c1cc13254g
|
“Synthesis of highly stable pure-silica thin-walled hexagonally ordered mesoporous material”. Verlooy P, Aerts A, Lebedev OI, Van Tendeloo G, Kirschhock C, Martens JA, Chemical communications , 4287 (2009). http://doi.org/10.1039/b901796h
Abstract: Hexagonally ordered mesoporous silica with a very narrow mesopore size distribution and exceptionally high stability paired with unusually thin pore walls was prepared using piperidine and cetyltrimethylammonium bromide.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 6.319
Times cited: 17
DOI: 10.1039/b901796h
|
“Synthesis of single wall carbon nanotubes by catalytic decomposition of hydrocarbons”. Colomer J-F, Bister G, Willems I, Konya Z, Fonseca A, Van Tendeloo G, Nagy JB, Chemical communications , 1343 (1999). http://doi.org/10.1039/a903142a
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 6.319
Times cited: 110
DOI: 10.1039/a903142a
|
“Fostering crack deviation via local internal stresses in Al/NiTi composites and its correlation with fracture toughness”. Zhao L, Ding L, Soete J, Idrissi H, Kerckhofs G, Simar A, Composites: part A: applied science and manufacturing 126, 105617 (2019). http://doi.org/10.1016/J.COMPOSITESA.2019.105617
Abstract: In the framework of metal matrix composites, a research gap exists regarding tailoring damage mechanisms. The present work aims at developing an Al/NiTi composite incorporating internal stresses in the vicinity of reinforcements. The composite is manufactured by friction stir processing which allows a homogenous NiTi distribution and a good Al/NiTi interface bonding. The internal stresses are introduced via shape memory effect of the embedded NiTi particles. The induced internal strain field is confirmed by digital image correlation and the corresponding stress field is evaluated by finite element simulation. It is found that the damage mechanism is modified in the presence of internal stresses. The consequent enhancement of fracture toughness arises by the fact that the internal stresses foster discrete damages shifted from the fracture ligament line. These damages release the stress concentration at the main crack tip and lead to a deviated crack path when coalescing to accommodate fracture propagation.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 4.075
DOI: 10.1016/J.COMPOSITESA.2019.105617
|
“Displacive-replacive phase transformation in a Ni62.5Al37.5 phase studies by HREM and microdiffraction”. Muto S, Merk N, Schryvers D, Tanner LE, Philosophical magazine: B: physics of condensed matter: electronic, optical and magnetic properties 67, 673 (1993). http://doi.org/10.1080/13642819308219316
Abstract: The structure of the metastable Ni2Al phase, which has long been a matter of controversy, has been carefully re-examined by means of high-resolution transmission electron microscopy (HREM) and electron microdiffraction. First, it is concluded that theas-quenched NixAl100-x(60 less-than-or-equal-to x less-than-or-equal-to 65) material already exhibits a partial omega-type collapse in a one-dimensional fashion which and is consistent with the anomalous dip in the phonon dispersion curve. Ni2Al precipitates are formed on annealing by thermal decomposition of the high-temperature NixAl100-xB2 phase and still retain the small omega-type shuffle. The amount of displacement in the well developed Ni2Al phase was estimated to be between 20 and 50% of the ideal omega collapse; this was determined by means of a combined technique of HREM and microdiffraction together with dynamical calculations of HREM images and diffraction intensities.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Times cited: 16
DOI: 10.1080/13642819308219316
|
“Do smaller probes in a scanning transmission electron microscope result in more precise measurement of the distances between atom columns?”.Van Aert S, van Dyck D, Philosophical magazine: B: physics of condensed matter: electronic, optical and magnetic properties 81, 1833 (2001). http://doi.org/10.1080/13642810108223121
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT); Vision lab
Times cited: 11
DOI: 10.1080/13642810108223121
|
“High-resolution electron microscopy of structural defects in crystalline C60 and C70”. Muto S, Van Tendeloo G, Amelinckx S, Philosophical magazine: B: physics of condensed matter: electronic, optical and magnetic properties 67, 443 (1993). http://doi.org/10.1080/13642819308207685
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Times cited: 31
DOI: 10.1080/13642819308207685
|
“'Natural' and 'man-made' platelets in type-la diamonds”. Kiflawi I, Bruley J, Luyten W, Van Tendeloo G, Philosophical magazine: B: physics of condensed matter: electronic, optical and magnetic properties 78, 299 (1998). http://doi.org/10.1080/13642819808205733
Abstract: 'Natural' platelets are planar defects in {001} planes found in natural type-IaA/B diamonds. 'Man-made' platelets are platelets formed in the laboratory by annealing type-IaA diamonds at temperatures over 2500 degrees C. Careful study shows that the infrared (IR) spectra of the 'man-made' platelets are different from the IR spectra of 'natural' platelets. High-temperature (T greater than or equal to 2000 degrees C) annealing of platelets containing type-IaA/B diamonds modifies the IR absorption spectrum owing to the 'natural' platelets and makes it similar to the IR spectrum of the 'man-made' platelets. It is suggested that such high-temperature annealing changes the structure of the 'natural' platelets. The changes are too subtle to be detected by electron microscopy techniques. Topographic electron-energy-loss spectroscopy shows that platelets contain nitrogen at an average density of 0.7 atoms per a(0)(2); however, high-temperature annealing does not seem to affect the concentration of the nitrogen in the platelets.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Times cited: 13
DOI: 10.1080/13642819808205733
|
“On the relationship between morphology, composition and structure of Al-Cu-Fe crystals and quasicrystals”. Balzuweit K, Meekes H, Van Tendeloo G, de Boer JL, Philosophical magazine: B: physics of condensed matter: electronic, optical and magnetic properties 67, 513 (1993). http://doi.org/10.1080/13642819308207689
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Times cited: 10
DOI: 10.1080/13642819308207689
|
“Conversion of platelets into dislocation loops and voidite formation in type IaB diamonds”. Evans T, Kiflawi I, Luyten W, Van Tendeloo G, Woods GS, Proceedings of the Royal Society of London: series A: mathematical and physical sciences 449, 295 (1995). http://doi.org/10.1098/rspa.1995.0045
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.192
Times cited: 32
DOI: 10.1098/rspa.1995.0045
|
“Electronic structure and band gap of zinc spinel oxides beyond LDA : ZnAl2O4, ZnGa2O4 and ZnIn2O4”. Dixit H, Tandon N, Cottenier S, Saniz R, Lamoen D, Partoens B, van Speybroeck V, Waroquier M, New journal of physics 13, 063002 (2011). http://doi.org/10.1088/1367-2630/13/6/063002
Abstract: We examine the electronic structure of the family of ternary zinc spinel oxides ZnX2O4 (X=Al, Ga and In). The band gap of ZnAl2O4 calculated using density functional theory (DFT) is 4.25 eV and is overestimated compared with the experimental value of 3.83.9 eV. The DFT band gap of ZnGa2O4 is 2.82 eV and is underestimated compared with the experimental value of 4.45.0 eV. Since DFT typically underestimates the band gap in the oxide system, the experimental measurements for ZnAl2O4 probably require a correction. We use two first-principles techniques capable of describing accurately the excited states of semiconductors, namely the GW approximation and the modified BeckeJohnson (MBJ) potential approximation, to calculate the band gap of ZnX2O4. The GW and MBJ band gaps are in good agreement with each other. In the case of ZnAl2O4, the predicted band gap values are >6 eV, i.e. ~2 eV larger than the only reported experimental value. We expect future experimental work to confirm our results. Our calculations of the electron effective masses and the second band gap indicate that these compounds are very good candidates to act as transparent conducting host materials.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT); Condensed Matter Theory (CMT)
Impact Factor: 3.786
Times cited: 98
DOI: 10.1088/1367-2630/13/6/063002
|
“Study of the thermal decomposition of melt-quenched Ni-rich metastable bcc and amorphous Ni-Zr alloys”. Cziraki A, Gerocs I, Fogarassy B, Van Tendeloo G, Sommer F, Bakonyi I, International journal of non-equilibrium processing 10, 265 (1998)
Abstract: The phase transformation sequences during thermal decomposition are investigated for Ni-rich melt-quenched body-centred cubic (bcc) and amorphous Ni-Zr alloys. Transmission electron microscopy (TEM) and X-ray diffraction (XRD) are used to determine the structure of crystallization products occurring after heating the melt-spun ribbon samples to various degrees of the phase transformation process monitored by differential scanning calorimetry (DSC). A single DSC peak is observed for both the bcc and amorphous Ni(91)Zr(9) alloys and a two-step process is indicated by DSC for the amorphous Ni(90)Zr(10) alloy. In the bcc-Ni(91)Zr(9) alloy which is actually a Ni(Zr) solid solution phase, the phase transformation starts with the precipitation of Ni(5)Zr crystallites followed, after a sufficient depletion of the matrix in Zr, by the subsequent transformation of the bcc-Ni(Zr) lattice to face-centred cubic (fcc) Ni. In the amorphous alloy of the same composition, the final products are fcc-Ni and Ni(5)Zr but at intermediate stages of the phase transformation, bcc-Ni(Zr) crystallites also appear. In the a-Ni(90)Zr(10) alloy the first DSC peak corresponds to the formation of the bcc-Ni(Zr) phase which then decomposes (second DSC peak) to the equilibrium phases fcc-Ni and Ni(5)Zr. Thus, in addition to the previous observation of the formation of the metastable bcc-Ni(Zr) phase by rapid quenching from the melt, here we present evidence that this phase can form also after partial crystallization of metallic glasses of appropriate chemical compositions.
Keywords: A1 Journal article; Engineering sciences. Technology; Electron microscopy for materials research (EMAT)
Times cited: 2
|
“Influence of 4H-SiC substrate miscut on the epitaxy and microstructure of AlGaN/GaN heterostructures”. Gkanatsiou A, Lioutas CB, Frangis N, Polychroniadis EK, Prystawko P, Leszczynski M, Altantzis T, Van Tendeloo G, Materials science in semiconductor processing 91, 159 (2019). http://doi.org/10.1016/j.mssp.2018.11.008
Abstract: AlGaN/GaN heterostructures were grown on “on-axis” and 2° off (0001) 4H-SiC substrates by metalorganic vapor phase epitaxy (MOVPE). Structural characterization was performed by transmission electron microscopy. The dislocation density, being greater in the on-axis case, is gradually reduced in the GaN layer and is forming
dislocation loops in the lower region. Steps aligned along [11̅00] in the off-axis case give rise to simultaneous defect formation. In the on-axis case, an almost zero density of steps is observed, with the main origin of defects probably being the orientation mismatch at the grain boundaries between the small not fully coalesced AlN grains. V-shaped formations are observed in the AlN nucleation layer, but are more frequent in the off-axis case, probably enhanced by the presence of steps. These V-shaped formations are completely overgrown by the GaN layer, during the subsequent deposition, presenting AlGaN areas in the walls of the defect, indicating an interdiffusion between the layers. Finally, at the AlGaN/GaN heterostructure surface in the on-axis case, V-shapes are observed, with the AlN spacer and AlGaN (21% Al) thickness on relaxed GaN exceeding the critical thickness for relaxation. On the other hand, no relaxation in the form of V-shape creation is observed in the off-axis case, probably due to the smaller AlGaN thickness (less than 21% Al). The AlN spacer layer, grown in between the heterostructure, presents a uniform thickness and clear interfaces.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 2.359
Times cited: 1
DOI: 10.1016/j.mssp.2018.11.008
|
“Chemical and structural analysis of etching residue layers in semiconductor devices with energy filtering transmission electron microscopy”. Hens S, van Landuyt J, Bender H, Boullart W, Vanhaelemeersch S, Materials science in semiconductor processing 4, 109 (2001). http://doi.org/10.1016/S1369-8001(00)00147-5
Abstract: The use of an energy-filtering held emission gun transmission electron microscope (CM30 FEG Ultratwin) allows, apart from imaging morphologies down to nanometer scale, the fast acquisition of high-resolution element distributions. Electrons that have lost energy corresponding to characteristic inner-shell loss edges are used to form the element maps. The production of Ultra Large-Scale Integration (ULSI) devices with dimensions below 0.25 mum requires among others the formation of a multilayer metallization scheme by means of repeatedly applying the deposition and etching of dielectrics and metals. In this work the evolution of the surface chemical species on etched Al lines in a post-etch cleaning process has been investigated by energy filtering transmission electron microscopy, with the aim to understand the role of each process step on the removal of the etching residues. (C) 2001 Elsevier Science Ltd. All rights reserved.
Keywords: A1 Journal article; Engineering sciences. Technology; Electron microscopy for materials research (EMAT)
Impact Factor: 2.359
DOI: 10.1016/S1369-8001(00)00147-5
|