| Ariskin, D.A.; Schweigert, I.V.; Alexandrov, A.L.; Bogaerts, A.; Peeters, F.M. |
Modeling of chemical processes in the low pressure capacitive radio frequency discharges in a mixture of Ar/C2H2 |
2009 |
Journal of applied physics |
105 |
21 |
UA library record; WoS full record; WoS citing articles |
