Number of records found: 1
 | 
Citations
 | 
   web
Dynamic Monte Carlo simulation for reactive sputtering of aluminium”. Chen ZY, Bogaerts A, Depla D, Ignatova V, Nuclear instruments and methods in physics research: B 207, 415 (2003). http://doi.org/10.1016/S0168-583X(03)01120-0
toggle visibility