| Records |
| Author |
Georgieva, V.; Bogaerts, A. |
| Title |
Negative ion behavior in single- and dual-frequency plasma etching reactors: particle-in-cell/Monte Carlo collision study |
Type |
A1 Journal article |
Year  |
2006 |
Publication |
Physical review : E : statistical physics, plasmas, fluids, and related interdisciplinary topics |
Abbreviated Journal |
Phys Rev E |
| Volume |
73 |
Issue |
3 |
Pages |
036402,1-9 |
| Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| Abstract |
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| Address |
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| Corporate Author |
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Thesis |
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| Publisher |
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Place of Publication |
Lancaster, Pa |
Editor |
|
| Language |
|
Wos |
000236467700081 |
Publication Date |
2006-06-10 |
| Series Editor |
|
Series Title |
|
Abbreviated Series Title |
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| Series Volume |
|
Series Issue |
|
Edition |
|
| ISSN |
1539-3755;1550-2376; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| Impact Factor |
2.366 |
Times cited |
7 |
Open Access |
|
| Notes |
|
Approved |
Most recent IF: 2.366; 2006 IF: 2.438 |
| Call Number |
UA @ lucian @ c:irua:57764 |
Serial |
2290 |
| Permanent link to this record |
| |
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| |
| Author |
Georgieva, V.; Bogaerts, A. |
| Title |
Plasma characteristics of an Ar/CF4/N2 discharge in an asymmetric dual frequency reactor: numerical investigation by a PIC/MC model |
Type |
A1 Journal article |
| Year |
2006 |
Publication |
Plasma sources science and technology |
Abbreviated Journal |
Plasma Sources Sci T |
| Volume |
15 |
Issue |
|
Pages |
368-377 |
| Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| Abstract |
|
| Address |
|
| Corporate Author |
|
Thesis |
|
| Publisher |
Institute of Physics |
Place of Publication |
Bristol |
Editor |
|
| Language |
|
Wos |
000240655500010 |
Publication Date |
2006-04-28 |
| Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| Series Volume |
|
Series Issue |
|
Edition |
|
| ISSN |
0963-0252;1361-6595; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| Impact Factor |
3.302 |
Times cited |
35 |
Open Access |
|
| Notes |
|
Approved |
Most recent IF: 3.302; 2006 IF: 2.346 |
| Call Number |
UA @ lucian @ c:irua:57550 |
Serial |
2630 |
| Permanent link to this record |
| |
|
| |
| Author |
Georgieva, V.; Bogaerts, A. |
| Title |
Numerical simulation of dual frequency etching reactors: influence of the external process parameters on the plasma characteristics |
Type |
A1 Journal article |
| Year |
2005 |
Publication |
Journal of applied physics |
Abbreviated Journal |
J Appl Phys |
| Volume |
98 |
Issue |
2 |
Pages |
023308,1-13 |
| Keywords |
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) |
| Abstract |
|
| Address |
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| Corporate Author |
|
Thesis |
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| Publisher |
American Institute of Physics |
Place of Publication |
New York, N.Y. |
Editor |
|
| Language |
|
Wos |
000230931500016 |
Publication Date |
2005-07-27 |
| Series Editor |
|
Series Title |
|
Abbreviated Series Title |
|
| Series Volume |
|
Series Issue |
|
Edition |
|
| ISSN |
0021-8979; |
ISBN |
|
Additional Links |
UA library record; WoS full record; WoS citing articles |
| Impact Factor |
2.068 |
Times cited |
75 |
Open Access |
|
| Notes |
|
Approved |
Most recent IF: 2.068; 2005 IF: 2.498 |
| Call Number |
UA @ lucian @ c:irua:53575 |
Serial |
2404 |
| Permanent link to this record |
