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Year
Publication
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Neyts, E.
;
Bogaerts, A.
;
van de Sanden, M.C.M.
Unraveling the deposition mechanism in a-C:H thin-film growth: a molecular-dynamics study for the reaction behavior of C
3
and C
3
H radicals with a-C:H surfaces
2006
Journal of applied physics
99
25
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