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“Nanohardness and structure of nitrogen implanted SixAly coatings post-implanted with oxygen”. Jacobs M, Bodart F, Terwagne G, Schryvers D, Poulet A, Nuclear instruments and methods in physics research: B: beam interactions with materials and atoms 147, 231 (1999). http://doi.org/10.1016/S0168-583X(98)00535-7
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