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  Author Title Year (up) Publication Volume Times cited Additional Links Links
Bultinck, E.; Mahieu, S.; Depla, D.; Bogaerts, A. Particle-in-cell/Monte Carlo collisions model for the reactive sputter deposition of nitride layers 2009 Plasma processes and polymers 6 2 UA library record; WoS full record; WoS citing articles doi
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