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Author Title Year (up) Publication Volume Times cited Additional Links
Georgieva, V.; Bogaerts, A. Negative ion behavior in single- and dual-frequency plasma etching reactors: particle-in-cell/Monte Carlo collision study 2006 Physical review : E : statistical physics, plasmas, fluids, and related interdisciplinary topics 73 7 UA library record; WoS full record; WoS citing articles