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Author
Title
Year
Publication
Volume
Times cited
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Zhang, Y.-R.
;
Tinck, S.
;
De Schepper, P.
;
Wang, Y.-N.
;
Bogaerts, A.
Modeling and experimental investigation of the plasma uniformity in CF
4
/O
2
capacitively coupled plasmas, operating in single frequency and dual frequency regime
2015
Journal of vacuum science and technology: A: vacuum surfaces and films
33
3
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