Cremers, V.; Rampelberg, G.; Baert, K.; Abrahami, S.; Claes, N.; de Oliveira, T.M.; Terryn, H.; Bals, S.; Dendooven, J.; Detavernier, C. |
Corrosion protection of Cu by atomic layer deposition |
2019 |
Journal of vacuum science and technology: A: vacuum surfaces and films |
37 |
7 |
UA library record; WoS full record; WoS citing articles |