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| Author | de Witte, H.; Vandervorst, W.; Gijbels, R. | ||||
| Title | Modeling of bombardment induced oxidation of silicon | Type | A1 Journal article | ||
| Year | 2001 | Publication | Journal of applied physics | Abbreviated Journal | J Appl Phys |
| Volume | 89 | Issue | 5 | Pages | 3001-3011 |
| Keywords | A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT) | ||||
| Abstract | |||||
| Address | |||||
| Corporate Author | Thesis | ||||
| Publisher | American Institute of Physics | Place of Publication | New York, N.Y. | Editor | |
| Language | Wos  |
000167133000077 | Publication Date | 2002-07-26 | |
| Series Editor | Series Title | Abbreviated Series Title | |||
| Series Volume | Series Issue | Edition | |||
| ISSN | 0021-8979; | ISBN | Additional Links | UA library record; WoS full record; WoS citing articles | |
| Impact Factor | 2.068 | Times cited | 16 | Open Access | |
| Notes | Approved | Most recent IF: 2.068; 2001 IF: 2.128 | |||
| Call Number | UA @ lucian @ c:irua:37253 | Serial | 2119 | ||
| Permanent link to this record | |||||