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Author
Title
Year
Publication
Volume
Times cited
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Georgieva, V.
;
Bogaerts, A.
;
Gijbels, R.
Numerical study of Ar/CF
4
/N
2
discharges in single and dual frequency capacitively coupled plasma reactors
2003
Journal of applied physics
94
90
UA library record
;
WoS full record
;
WoS citing articles