Abstract: mu-XRF is the microscopic equivalent of the well-established multielement analytical technique. In this paper, after comparing the interaction of X-ray photons, electrons and protons with matter and an introduction to synchrotron rings and microfocussing of X-rays, the instrumentation for mu-XRF is discussed, both for laboratory source and synchrotron based setups and the analytical characteristics of mu-XRF are contrasted to that of other microanalytical techniques, Also, this issue of quantification of mu-XRF data is addressed; the applicability of the method in archeological and geological analysis is illustrated.

Abstract: Ibis work illustrates the development of X-ray fluorescence tomography and polycapillary based confocal imaging towards a three-dimensional (313), quantitative analytical method with lateral resolution levels down to the 2-20 mum scale. Detailed analytical characterization is given for polycapillary based confocal XRF imaging, which is a new variant of the 3D micro-XRF technique. Applications for 2D/3D micro-XR-F are illustrated for the analysis of biological (zooplankton) and geological samples (microscopic inclusions in natural diamonds and fluid inclusions in quartz). Based on confocal imaging, fully three-dimensional distributions of trace elements could be obtained, representing a significant generalization of the regular 2D scanning technique for micro-XRF spectroscopy. The experimental work described in this paper has been carried out at the ESRF ID18F microfluorescence end-station and at HASYLAB Beam Line L.