Home | << 1 >> |
Record | |||||
---|---|---|---|---|---|
Author | de Gendt, S.; Kenis, K.; Mertens, P.W.; Heyns, M.M.; Claes, M.; Van Grieken, R.E.; Bailleul, A.; Knotter, M.; de Bokx, P.K. | ||||
Title | Use of grazing emission XRF spectrometry for silicon wafer surface contamination measurements | Type | P3 Proceeding | ||
Year | 1996 | Publication | Abbreviated Journal | ||
Volume | Issue | Pages | |||
Keywords | P3 Proceeding; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation) | ||||
Abstract | |||||
Address | |||||
Corporate Author | Thesis | ||||
Publisher | Place of Publication | Editor | |||
Language | Wos | Publication Date | |||
Series Editor | Series Title | Abbreviated Series Title | |||
Series Volume | Series Issue | Edition | |||
ISSN | ISBN | Additional Links | UA library record | ||
Impact Factor | Times cited | Open Access | |||
Notes | Approved | no | |||
Call Number | UA @ admin @ c:irua:14679 | Serial | 8720 | ||
Permanent link to this record |