Author |
Title |
Year |
Publication |
Volume |
Times cited |
Additional Links |
Tinck, S.; Altamirano-Sánchez, E.; De Schepper, P.; Bogaerts, A. |
Formation of a nanoscale SiO2 capping layer on photoresist lines with an Ar/SiCl4/O2 inductively coupled plasma : a modeling investigation |
2014 |
Plasma processes and polymers |
11 |
1 |
UA library record; WoS full record; WoS citing articles |
Tinck, S.; De Schepper, P.; Bogaerts, A. |
Numerical investigation of SiO2 coating deposition in wafer processing reactors with SiCl4/O2/Ar inductively coupled plasmas |
2013 |
Plasma processes and polymers |
10 |
3 |
UA library record; WoS full record; WoS citing articles |
Teodoru, S.; Kusano, Y.; Bogaerts, A. |
The effect of O2 in a humid O2/N2/NOx gas mixture on NOx and N2O remediation by an atmospheric pressure dielectric barrier discharge |
2012 |
Plasma processes and polymers |
9 |
24 |
UA library record; WoS full record; WoS citing articles |
Aerts, R.; Tu, X.; De Bie, C.; Whitehead, J.C.; Bogaerts, A. |
An investigation into the dominant reactions for ethylene destruction in non-thermal atmospheric plasmas |
2012 |
Plasma processes and polymers |
9 |
46 |
UA library record; WoS full record; WoS citing articles |
Tinck, S.; Bogaerts, A. |
Modeling SiH4/O2/Ar inductively coupled plasmas used for filling of microtrenches in shallow trench isolation (STI) |
2012 |
Plasma processes and polymers |
9 |
5 |
UA library record; WoS full record; WoS citing articles |
De Bie, C.; Verheyde, B.; Martens, T.; van Dijk, J.; Paulussen, S.; Bogaerts, A. |
Fluid modeling of the conversion of methane into higher hydrocarbons in an atmospheric pressure dielectric barrier discharge |
2011 |
Plasma processes and polymers |
8 |
70 |
UA library record; WoS full record; WoS citing articles |
Tinck, S.; Bogaerts, A.; Shamiryan, D. |
Simultaneous etching and deposition processes during the etching of silicon with a Cl2/O2/Ar inductively coupled plasma |
2011 |
Plasma processes and polymers |
8 |
5 |
UA library record; WoS full record; WoS citing articles |
Bultinck, E.; Mahieu, S.; Depla, D.; Bogaerts, A. |
Particle-in-cell/Monte Carlo collisions model for the reactive sputter deposition of nitride layers |
2009 |
Plasma processes and polymers |
6 |
2 |
UA library record; WoS full record; WoS citing articles |
Bogaerts, A.; Bultinck, E.; Eckert, M.; Georgieva, V.; Mao, M.; Neyts, E.; Schwaederlé, L. |
Computer modeling of plasmas and plasma-surface interactions |
2009 |
Plasma processes and polymers |
6 |
18 |
UA library record; WoS full record; WoS citing articles |
Kolev, I.; Bogaerts, A. |
PIC – MCC numerical simulation of a DC planar magnetron |
2006 |
Plasma processes and polymers |
3 |
27 |
UA library record; WoS full record; WoS citing articles |
Bogaerts, A.; de Bleecker, K.; Georgieva, V.; Kolev, I.; Madani, M.; Neyts, E. |
Computer simulations for processing plasmas |
2006 |
Plasma processes and polymers |
3 |
8 |
UA library record; WoS full record; WoS citing articles |
Baguer, N.; Neyts, E.; van Gils, S.; Bogaerts, A. |
Study of atmospheric MOCVD of TiO2 thin films by means of computational fluid dynamics simulations |
2008 |
Chemical vapor deposition |
14 |
14 |
UA library record; WoS full record; WoS citing articles |
Eckert, M.; Neyts, E.; Bogaerts, A. |
Molecular dynamics simulations of the sticking and etch behavior of various growth species of (ultra)nanocrystalline diamond films |
2008 |
Chemical vapor deposition |
14 |
25 |
UA library record; WoS full record; WoS citing articles |
Neyts, E.; Eckert, M.; Bogaerts, A. |
Molecular dynamics simulations of the growth of thin a-C:H films under additional ion bombardment: influence of the growth species and the Ar+ ion kinetic energy |
2007 |
Chemical vapor deposition |
13 |
14 |
UA library record; WoS full record; WoS citing articles |
Kolev, I.; Bogaerts, A. |
Numerical models of the planar magnetron glow discharges |
2004 |
Contributions to plasma physics |
44 |
22 |
UA library record; WoS full record; WoS citing articles |
Bogaerts, A.; Schelles, W.; van Grieken, R. |
Analysis of nonconducting materials by dc glow discharge spectrometry |
2003 |
|
|
|
UA library record |
Bogaerts, A.; Gijbels, R. |
Calculation of crater profiles on a flat cathode in a direct current glow discharge, and comparison with experiment |
1997 |
Spectrochimica acta: part B : atomic spectroscopy |
52 |
42 |
UA library record; WoS full record; WoS citing articles |
van Dijk, J.; Kroesen, G.M.W.; Bogaerts, A. |
Cluster issue on plasma modelling |
2009 |
|
|
|
UA library record |
Janssens, K.; Bogaerts, A.; van Grieken, R. |
Colloquium Spectroscopicum Internationale 34: a collection of papers presented at the Colloquium Spectroscopicum Internationale, Antwerp, Belgium, 4-9 September 2005 |
2006 |
|
|
|
UA library record |
Bogaerts, A.; Janssens, K.; van Grieken, R. |
Colloquium Spectroscopicum Internationale 34 (CSI 34), Antwerp, Belgium, 4-9 September 2005 |
2006 |
|
|
|
UA library record |
Bogaerts, A.; Gijbels, R. |
Comparison of argon and neon as discharge gases in a direct current glow discharge: a mathematical simulation |
1997 |
Spectrochimica acta: part B : atomic spectroscopy |
52 |
13 |
UA library record; WoS full record; WoS citing articles |
Bogaerts, A.; Gijbels, R. |
Comprehensive three-dimensional modeling network for a dc glow discharge plasma |
1998 |
Plasma physics reports |
24 |
8 |
UA library record; WoS full record; WoS citing articles |
Bogaerts, A.; Gijbels, R. |
Computer simulation of an analytical direct current glow discharge in argon: influence of the cell dimensions on the plasma quantities |
1997 |
Journal of analytical atomic spectrometry |
12 |
21 |
UA library record; WoS full record; WoS citing articles |
De Bie, C.; Martens, T.; van Dijk, J.; van der Mullen, J.J.A.M.; Bogaerts, A. |
Description of the plasma chemistry in an atmospheric pressure CH4 dielectric barrier discharge using a two dimensional fluid model |
2009 |
|
|
|
UA library record; WoS full record; WoS citing articles |
Herrebout, D.; Bogaerts, A.; Yan, M.; Goedheer, W.; Dekempeneer, E.; Gijbels, R. |
An extended RF methane plasma 1D fluid model of interest in deposition of diamond-like carbon layers |
2000 |
|
|
|
UA library record |
Bogaerts, A. |
Glow discharge mass spectrometry, methods |
2000 |
|
|
|
UA library record |
Steiner, R.E.; Barshick, C.M.; Bogaerts, A. |
Glow discharge optical spectroscopy and mass spectrometry |
2009 |
|
|
|
UA library record |
Jakubowski, N.; Bogaerts, A.; Hoffmann, V. |
Glow discharges in emission and mass spectrometry |
2003 |
|
|
|
UA library record |
Martens, T.; Brok, W.J.M.; van Dijk, J.; Bogaerts, A. |
Improving dielectric barrier discharge efficiency by optimizing voltage profiles |
2009 |
|
|
|
UA library record; WoS full record; |
Derzsi, A.; Donko, Z.; Bogaerts, A.; Hoffmann, V. |
The influence of the secondary electron emission coefficient and effect of the gas heating on the calculated electrical characteristics of a grimm type glow discharge cell |
2008 |
|
|
|
UA library record; WoS full record; WoS citing articles |