“Magnetohydrodynamic properties of incompressible Meissner fluids”. Maeyens A, Tempère J, European physical journal : B : condensed matter and complex systems 58, 231 (2007). http://doi.org/10.1140/epjb/e2007-00236-x
Keywords: A1 Journal article; Theory of quantum systems and complex systems; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 1.461
DOI: 10.1140/epjb/e2007-00236-x
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“Nanotube field and one-dimensional fluctuations of C60 molecules in carbon nanotubes”. Michel KH, Verberck B, Nikolaev AV, European physical journal : B : condensed matter and complex systems 48, 113 (2005). http://doi.org/10.1140/epjb/e2005-00378-9
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 1.461
Times cited: 25
DOI: 10.1140/epjb/e2005-00378-9
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“Nucleation of superconductivity in mesoscopic star-shaped superconductors”. Dikin DA, Chandrasekhar V, Misko VR, Fomin VM, Devreese JT, European Physical Journal B 34, 231 (2003). http://doi.org/10.1140/epjb/e2003-00216-2
Keywords: A1 Journal article; Electron Microscopy for Materials Science (EMAT);
Impact Factor: 1.461
Times cited: 5
DOI: 10.1140/epjb/e2003-00216-2
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“Ginzburg-Landau theory and effects of pressure on a two-band superconductor : application to MgB2”. Betouras JJ, Ivanov VA, Peeters FM, European physical journal : B : condensed matter and complex systems 31, 349 (2003). http://doi.org/10.1140/epjb/e2003-00041-7
Abstract: We present a model of pressure effects of a two-band superconductor based on a Ginzburg-Landau free energy with two order parameters. The parameters of the theory are pressure as well as temperature dependent. New pressure effects emerge as a result of the competition between the two bands. The theory then is applied to MgB2. We identify two possible scenaria regarding the fate of the two Q subbands under pressure, depending on whether or not both subbands are above the Fermi energy at ambient pressure. The splitting of the two subbands is probably caused by the E-2g, distortion. If only one subband is above the Fermi energy at ambient pressure (scenario I), application of pressure diminishes the splitting and it is possible that the lower subband participates in the superconductivity. The corresponding crossover pressure and Gruneisen parameter are estimated. In the second scenario both bands start above the Fermi energy and they move below it, either by pressure or via the substitution of Mg by Al. In both scenaria, the possibility of electronical topological transition is emphasized. Experimental signatures of both scenaria are presented and existing experiments are discussed in the light of the different physical pictures.
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 1.461
Times cited: 10
DOI: 10.1140/epjb/e2003-00041-7
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“Electron diffraction and microscopy of single-wall carbon nanotube bundles produced by different methods”. Colomer J-F, Henrard L, Lambin P, Van Tendeloo G, European physical journal : B : condensed matter and complex systems 27, 111 (2002). http://doi.org/10.1140/epjb/e20020135
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 1.461
Times cited: 43
DOI: 10.1140/epjb/e20020135
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“Associations between ambient, personal, and indoor exposure to fine particulate matter constituents in Dutch and Finnish panels of cardiovascular patients”. Janssen NAH, Lanki T, Hoek G, Vallius M, de Hartog JJ, Van Grieken R, Pekkanen J, Brunekreef B, Occupational and environmental medicine 62, 868 (2005). http://doi.org/10.1136/OEM.2004.016618
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1136/OEM.2004.016618
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“Electron diffraction measurement of the binding rigidity of free-standing graphene”. Kirilenko DA, Technical physics letters 39, 325 (2013). http://doi.org/10.1134/S1063785013040081
Abstract: A method for measuring the binding rigidity of free-standing graphene from the dependence of the short-wavelength spectral range of transverse structural fluctuations of a crystal is proposed. The fluctuation spectrum is measured according to the variation in electron-diffraction patterns derived in a transmission electron microscope while tilting the sample.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 0.771
Times cited: 3
DOI: 10.1134/S1063785013040081
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“Andreev-type states induced by quantum confinement”. Shanenko AA, Croitoru MD, Mints RG, Peeters FM, Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques 2, 611 (2008). http://doi.org/10.1134/S1027451008040216
Abstract: The properties of a clean superconductor with nanoscale dimensions are governed by quantum confinement of the electrons. This results in a spatially inhomogeneous superconducting condensate and in the formation of new Andreev-type quasiparticle states. These states are mainly located beyond regions where the superconducting condensate is enhanced. A numerical self-consistent solution of the Bogoliubov-de Gennes equations for a cylindrical metallic nanowire shows that these new Andreev-type states decrease the ratio of the energy gap to the critical temperature.
Keywords: A1 Journal article; Condensed Matter Theory (CMT); Electron microscopy for materials research (EMAT)
Times cited: 1
DOI: 10.1134/S1027451008040216
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“Lanthanum-strontium cuprate as a promising cathodic matreila for solid oxide fuel cells”. Mazo GN, Savvin SN, Abakumov AM, Hadermann J, Dobrovol'skii YA, Leonova LS, Russian journal of electrochemistry 43, 436 (2007). http://doi.org/10.1134/S1023193507040106
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 0.828
Times cited: 8
DOI: 10.1134/S1023193507040106
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“The synthesis and thermodynamic properties of strontium fluoromanganite Sr2.5Mn6O12.5-\deltaF2”. Kovba ML, Skolis YY, Abakumov AM, Hadermann J, Sukhushina IS, Russian journal of physical chemistry A 84, 2033 (2010). http://doi.org/10.1134/S0036024410120046
Abstract: The existence of the [SrF(0.8)O(0.1)](2.5)[Mn(6)O(12)] = Sr(2.5)Mn(6)O(12.5 – delta)F(2) compound was established in the SrO-Mn(2)O(3)-SrF(2) system at 900A degrees C and p(O(2)) = 1 atm. The crystal structure of strontium fluoromanganite was determined from the X-ray powder diffraction data, electron diffraction, and high-resolution electron microscopy. It can be described in the monoclynic system with four Miller hklm indices: hklm: H = h a* + k b* + l c (1) (*) + m q (1), q (1), q (1) = c (2) (*) = gamma c (1) (*) , gamma a parts per thousand 0.632, a a parts per thousand a a parts per thousand 9.72 , b a parts per thousand 9.55 , c (1) a parts per thousand 2.84 , c (2) a parts per thousand 4.49 , monoclinic angle gamma a parts per thousand 95.6A degrees. The electromotive force method with a solid fluorine ion electrolyte was used to refine the composition of fluoromanganite and determine the thermodynamic functions of its formation from phases neighboring in the phase diagram (SrMn(3)O(6), Mn(2)O(3), SrF(2), and oxygen), Delta GA degrees, kJ/mol = -(111.7 +/- 1.9) + (89.5 +/- 1.5) x 10(-3) T.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 0.581
Times cited: 1
DOI: 10.1134/S0036024410120046
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“Effect of Bimetallic Pd/Pt Clusters on the Sensing Properties of Nanocrystalline SnO2 in the Detection of CO”. Malkov I V, Krivetskii VV, Potemkin D I, Zadesenets A V, Batuk MM, Hadermann J, Marikutsa A V, Rumyantseva MN, Gas'kov AM, Russian journal of inorganic chemistry 63, 1007 (2018). http://doi.org/10.1134/S0036023618080168
Abstract: Nanocrystalline tin dioxide modified by Pd and Pt clusters or by bimetallic PdPt nanoparticles was synthesized. Distribution of the modifers on the SnO2 surface was studied by high-resolution transmission electron microscopy and energy dispersive X-ray microanalysis with element distribution mapping. It was shown that the Pd/Pt ratio in bimetallic particles varies over a broad range and does not depend on the particle diameter. The effect of platinum metals on the reducibility of nanocrystalline SnO2 by hydrogen was determined. The sensing properties of the resulting materials towards 6.7 ppm CO in air were estimated in situ by electrical conductivity measurements. The sensor response of SnO2 modified with bimetallic PdPt particles was a superposition of the signals of samples with Pt and Pd clusters.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 0.787
Times cited: 3
DOI: 10.1134/S0036023618080168
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“Effect of the size of nanoparticles on the properties of a capacitive high-frequency discharge”. Shveigert IV, Peeters FM, Journal of experimental and theoretical physics letters 86, 572 (2007). http://doi.org/10.1134/S0021364007210047
Abstract: The properties of a capacitive HF discharge with growing nanoparticles are studied with the use of kinetic PIC-MCC simulation. At the initial stage of growth, the nanoparticles are shown to be localized at the interface between the near-electrode layer and quasi-neutral plasma, where the rate of ionization by electron impact has the maximum value. At the beginning of formation of particles, plasma parameters change rapidly and a transition between the capacitive and spatial discharge burning modes is observed for a certain critical size of the particles. If the growth of the dust particles continues, their distribution over the discharge becomes more uniform and the steady-state parameters of the gas-discharge plasma hardly change.
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 1.235
Times cited: 11
DOI: 10.1134/S0021364007210047
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“Zirconia-modified exfoliated graphite”. Afanasov IM, Van Tendeloo G, Inorganic materials 47, 603 (2011). http://doi.org/10.1134/S0020168511050013
Abstract: Zirconia has been incorporated into exfoliated graphite (EG) through the anodic polarization in the natural graphite-ZrO(NO3)2-HNO3-H2O system, followed by flash heating. The thermal properties of the oxidized graphites employed as precursors to EG have been studied by thermogravimetry in combination with differential scanning calorimetry, and the distribution of ZrO2 particles in the EG has been assessed by scanning and transmission electron microscopy. Conditions are described for the preparation of EG with bulk densities in the range 1.34.7 g/l and ZrO2 contents in the range 434 wt %.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 0.62
DOI: 10.1134/S0020168511050013
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“Dislocations and plasticity of experimentally deformed coesite”. Idrissi H, Cordier P, Jacob D, Walte N, European journal of mineralogy 20, 665 (2008). http://doi.org/10.1127/0935-1221/2008/0020-1849
Abstract: Dislocation microstructures have been characterized by transmission electron microscopy in polycrystalline coesite deformed experimentally at 4 GPa, 1200 degrees C. Burgers vectors have been determined by large-angle convergent-beam electron diffraction. Sample orientation was assisted by precession electron diffraction to overcome difficulties arising from pseudo-hexagonal symmetry. The results are explained by using a pseudo-hexagonal setting. We found that most dislocations observed are of the 1/3 < 2 (1) over bar(1) over bar0 > type. No clear glide plane was identified, suggesting that climb is activated under these conditions. This conclusion is supported by the observation of numerous subgrain boundaries. We have also observed some [00011 dislocations. Finally, the C12/cl space group to which coesite belongs being centred, an additional slip system is observed: 1/6[(1) over bar2 (1) over bar3](01 (1) over bar1) (1/2[(1) over bar 10](110) in the monoclinic setting).
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 1.362
Times cited: 5
DOI: 10.1127/0935-1221/2008/0020-1849
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“Tuning quantum nonlocal effects in graphene plasmonics”. Lundeberg MB, Gao Y, Asgari R, Tan C, Van Duppen B, Autore M, Alonso-Gonzalez P, Woessner A, Watanabe K, Taniguchi T, Hillenbrand R, Hone J, Polini M, Koppens FHL, Science 357, 187 (2017). http://doi.org/10.1126/SCIENCE.AAN2735
Abstract: The response of electron systems to electrodynamic fields that change rapidly in space is endowed by unique features, including an exquisite spatial nonlocality. This can reveal much about the materials' electronic structure that is invisible in standard probes that use gradually varying fields. Here, we use graphene plasmons, propagating at extremely slow velocities close to the electron Fermi velocity, to probe the nonlocal response of the graphene electron liquid. The near-field imaging experiments reveal a parameter-free match with the full quantum description of the massless Dirac electron gas, which involves three types of nonlocal quantum effects: single-particle velocity matching, interaction-enhanced Fermi velocity, and interaction-reduced compressibility. Our experimental approach can determine the full spatiotemporal response of an electron system.
Keywords: A1 Journal article; Engineering sciences. Technology; Condensed Matter Theory (CMT)
Impact Factor: 37.205
Times cited: 87
DOI: 10.1126/SCIENCE.AAN2735
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“A structure model and growth mechanism for multishell carbon nanotubes”. Amelinckx S, Bernaerts D, Zhang XB, Van Tendeloo G, van Landuyt J, Science 267, 1334 (1995). http://doi.org/10.1126/science.267.5202.1334
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 33.611
Times cited: 169
DOI: 10.1126/science.267.5202.1334
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“Internal mixture of sea salt, silicates, and excess sulfate in marine aerosols”. Andreae MO, Charlson RJ, Bruynseels F, Storms H, Van Grieken R, Maenhaut W, Science 232, 1620 (1986). http://doi.org/10.1126/SCIENCE.232.4758.1620
Abstract: Individual aerosol particles from the remote marine atmosphere were investigated by scanning electron microscopy and electron microprobe analysis. A large fraction of the silicate mineral component of the aerosol was found to be internally mixed with sea-salt aerosol particles. This observation explains the unexpected similarity in the size distributions of silicates and sea salt that has been observed in remote marine aerosols. Reentrainment of dust particles previously deposited onto the sea surface and collision between aerosol particles can be excluded as possible source mechanisms for these internally mixed aerosols. The internal mixing could be produced by processes within clouds, including droplet coalescence. Cloud processes may also be responsible for the observed enrichment of excess (nonsea-salt) sulfate on sea-salt particles.
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
DOI: 10.1126/SCIENCE.232.4758.1620
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“Elemental compositions of comet 81P/Wild 2 samples collected by Stardust”. Flynn GJ, Janssens K, Vekemans B, [et al], Science 314, 1731 (2006). http://doi.org/10.1126/SCIENCE.1136141
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Impact Factor: 37.205
Times cited: 174
DOI: 10.1126/SCIENCE.1136141
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“Analogy between one-dimensional chain models and graphene”. Matulis A, Peeters FM, American journal of physics 77, 595 (2009). http://doi.org/10.1119/1.3127143
Abstract: The electron and hole spectrum in single and bilayer graphene is derived from known one-dimensional models, and the relation between the spectrum and symmetry of the lattice is shown.
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 1.069
Times cited: 11
DOI: 10.1119/1.3127143
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“The magnetic Kronig-Penney model”. Ibrahim IS, Peeters FM, American journal of physics 63, 171 (1995). http://doi.org/10.1119/1.17977
Keywords: A1 Journal article; Condensed Matter Theory (CMT)
Impact Factor: 0.956
Times cited: 21
DOI: 10.1119/1.17977
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“The identification of chromophores in ancient glass by the use of UV-VIS-NIR spectroscopy”. Meulebroeck W, Baert K, Wouters H, Cosyns P, Ceglia A, Cagno S, Janssens K, Nys K, Terryn H, Thienpont H, Proceedings of the Society of Photo-optical Instrumentation Engineers 7726, 77260d (2010). http://doi.org/10.1117/12.853666
Abstract: In this publication optical spectroscopy is considered to be a supplementary technique to study ancient colored glass. It results from a systematic study of the UV-VIS-NIR transmission spectra of intentionally colored glass fragments from various archaeological and historical sites and dated from the Roman period to the 21th century AD. The main goal consists of defining optical sensing parameters for this type of material. The considered colorants are iron, cobalt, manganese, copper and chromium. It is proved that many cases exist where optical spectroscopy can be seen as a straightforward, non-destructive, low-cost and in-situ applicable technique in identifying authentic material or to obtain information about the origin of the material. Possible sensing parameters are defined as the absence/presence of absorption bands characteristic for a specific coloring metal oxide and the spectral position of these bands. These parameters could reveal information about the applied furnace conditions and/or to the composition of the glass matrix. It is shown that the cobalt absorption band situated around 535 nm for soda rich glasses (Roman and industrial times) is shifted towards 526 nm for potash rich glasses (medieval and post-medieval times).
Keywords: A1 Journal article; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
Times cited: 10
DOI: 10.1117/12.853666
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“Structural description of high Tc cuprate superconductors”. Milat O, Van Tendeloo G, Amelinckx S, Spie 2697, 95 (1996). http://doi.org/10.1117/12.250232
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
DOI: 10.1117/12.250232
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“Crystalline structure of very hard tungsten carbide thin films obtained by reactive pulsed laser deposition”. Mihailescu IN, Gyorgy E, Marin G, Popescu M, Teodorescu VS, van Landuyt J, Grivas C, Hatziapostolou A, Journal of vacuum science and technology: A: vacuum surfaces and films 17, 249 (1999). http://doi.org/10.1116/1.581579
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 1.374
Times cited: 8
DOI: 10.1116/1.581579
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“Influence of sticking coefficients on the behavior of sputtered atoms in an argon glow discharge: modeling and comparison with experiment”. Bogaerts A, Naylor J, Hatcher M, Jones WJ, Mason R, Journal of vacuum science and technology: A: vacuum surfaces and films 16, 2400 (1998). http://doi.org/10.1116/1.581359
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 1.374
Times cited: 12
DOI: 10.1116/1.581359
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“Thermal recrystallization of short-range ordered WS2 films”. Heyne MH, de Marneffe J-F, Radu I, Neyts EC, De Gendt S, Journal of vacuum science and technology: A: vacuum surfaces and films 36, 05g501 (2018). http://doi.org/10.1116/1.5036654
Abstract: The integration of van der Waals materials in nanoelectronic devices requires the deposition of few-layered MX2 films with excellent quality crystals covering a large area. In recent years, astonishing progress in the monolayer growth of WS2 and MoS2 was demonstrated, but multilayer growth resulted often in separated triangular or hexagonal islands. These polycrystalline films cannot fully employ the specific MX2 properties since they are not connected in-plane to the other domains. To coalesce separated islands, ultrahigh-temperature postdeposition anneals in H2S are applied, which are not compatible with bare silicon substrates. Starting from the deposition of stoichiometric short-ordered films, the present work studies different options for subsequent high-temperature annealing in an inert atmosphere to form crystalline films with large grains from stoichiometric films with small grains. The rapid thermal annealing, performed over a few seconds, is compared to excimer laser annealing in the nanosecond range, which are both able to crystallize the thin WS2. The WS2 recrystallization temperature can be lowered using metallic crystallization promoters (Co and Ni). The best result is obtained using a Co cap, due to the circumvention of Co and S binary phase formation below the eutectic temperature. The recrystallization above a critical temperature is accompanied by sulfur loss and 3D regrowth. These undesired effects can be suppressed by the application of a dielectric capping layer prior to annealing. A SiO2 cap can suppress the sulfur loss successfully during annealing and reveals improved material quality in comparison to noncapped films Published by the AVS.
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 1.374
Times cited: 2
DOI: 10.1116/1.5036654
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“Electromagnetic effects in high-frequency large-area capacitive discharges : a review”. Liu Y-X, Zhang Y-R, Bogaerts A, Wang Y-N, Journal of vacuum science and technology: A: vacuum surfaces and films 33, 020801 (2015). http://doi.org/10.1116/1.4907926
Abstract: In traditional capacitively coupled plasmas, the discharge can be described by an electrostatic model, in which the Poisson equation is employed to determine the electrostatic electric field. However, current plasma reactors are much larger and driven at a much higher frequency. If the excitation wavelength k in the plasma becomes comparable to the electrode radius, and the plasma skin depth d becomes comparable to the electrode spacing, the electromagnetic (EM) effects will become significant and compromise the plasma uniformity. In this regime, capacitive discharges have to be described by an EM model, i.e., the full set of Maxwells equations should be solved to address the EM effects. This paper gives an overview of the theory, simulation and experiments that have recently been carried out to understand these effects, which cause major uniformity problems in plasma processing for microelectronics and flat panel display industries. Furthermore, some methods for improving the plasma uniformity are also described and compared.
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 1.374
Times cited: 10
DOI: 10.1116/1.4907926
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“Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing”. Deng S, Verbruggen SW, Lenaerts S, Martens JA, Van den Berghe S, Devloo-Casier K, Devulder W, Dendoover J, Deduytsche D, Detavernier C, Journal of vacuum science and technology: A: vacuum surfaces and films 32, 01a123 (2014). http://doi.org/10.1116/1.4847976
Abstract: In order to narrow the band gap of TiO2, nitrogen doping by combining thermal atomic layer deposition (TALD) of TiO2 and plasma enhanced atomic layer deposition (PEALD) of TiN has been implemented. By altering the ratio between TALD TiO2 and PEALD TiN, the as synthesized TiOxNy films showed different band gaps (from 1.91 eV to 3.14 eV). In situ x-ray diffraction characterization showed that the crystallization behavior of these films changed after nitrogen doping. After annealing in helium, nitrogen doped TiO2 films crystallized into rutile phase while for the samples annealed in air a preferential growth of the anatase TiO2 along (001) orientation was observed. Photocatalytic tests of the degradation of stearic acid were done to evaluate the effect of N doping on the photocatalytic activity.
Keywords: A1 Journal article; Engineering sciences. Technology; Sustainable Energy, Air and Water Technology (DuEL)
Impact Factor: 1.374
Times cited: 10
DOI: 10.1116/1.4847976
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“PECVD growth of carbon nanotubes : from experiment to simulation”. Neyts EC, Journal of vacuum science and technology: B: micro-electronics processing and phenomena 30, 030803 (2012). http://doi.org/10.1116/1.3702806
Abstract: Nanostructured carbon materials show a tremendous variety in atomic structure, morphology, properties, and applications. As all properties are ultimately determined by the structure of the material, a thorough understanding of the growth mechanisms that give rise to the particular structure is critical. On many occasions, it has been shown that plasma enhanced growth can be strongly beneficial. This review will describe the authors current understanding of plasma enhanced growth of carbon nanotubes, the prototypical example of nanostructured carbon materials, as obtained from experiments, simulations, and modeling. Specific emphasis is put on where experiments and computational approaches correspond, and where they differ. Also, the current status on simulating PECVD growth of some other carbon nanomaterials is reviewed, including amorphous carbon, graphene, and metallofullerenes. Finally, computational challenges with respect to the simulation of PECVD growth are identified.
Keywords: A1 Journal article; Engineering sciences. Technology; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Times cited: 42
DOI: 10.1116/1.3702806
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“Reaction mechanisms for atomic layer deposition of aluminum oxide on semiconductor substrates”. Delabie A, Sioncke S, Rip J, Van Elshocht S, Pourtois G, Mueller M, Beckhoff B, Pierloot K, Journal of vacuum science and technology: A: vacuum surfaces and films 30, 01a127 (2012). http://doi.org/10.1116/1.3664090
Abstract: In this work, we have studied the TMA/H(2)O (TMA Al(CH(3))(3)) atomic layer deposition (ALD) of Al(2)O(3) on hydroxyl (OH) and thiol (SH) terminated semiconductor substrates. Total reflection x-ray fluorescence reveals a complex growth-per-cycle evolution during the early ALD reaction cycles. OH and SH terminated surfaces demonstrate growth inhibition from the second reaction cycle on. Theoretical calculations, based on density functional theory, are performed on cluster models to investigate the first TMA/H(2)O reaction cycle. Based on the theoretical results, we discuss possible mechanisms for the growth inhibition from the second reaction cycle on. In addition, our calculations show that AlCH(3) groups are hydrolyzed by a H(2)O molecule adsorbed on a neighboring Al atom, independent of the type of backbonds (Si-O, Ge-O, or Ge-S) of AlCH(3). The coordination of Al remains four-fold after the first TMA/H(2)O reaction cycle. (C) 2012 American Vacuum Society. [DOI: 10.1116/1.3664090]
Keywords: A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Impact Factor: 1.374
Times cited: 41
DOI: 10.1116/1.3664090
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“Addition of yttrium into HfO2 films: microstructure and electrical properties”. Dubourdieu C, Rauwel E, Roussel H, Ducroquet F, Hollaender B, Rossell M, Van Tendeloo G, Lhostis S, Rushworth S, Journal of vacuum science and technology: A: vacuum surfaces and films 27, 503 (2009). http://doi.org/10.1116/1.3106627
Abstract: The cubic phase of HfO2 was stabilized by addition of yttrium in thin films grown on Si/SiO2 by metal-organic chemical vapor deposition. The cubic phase was obtained for contents of 6.5 at. % Y or higher at a temperature as low as 470 °C. The complete compositional range (from 1.5 to 99.5 at. % Y) was investigated. The crystalline structure of HfO2 was determined from x-ray diffraction, electron diffraction, and attenuated total-reflection infrared spectroscopy. For cubic films, the continuous increase in the lattice parameter indicates the formation of a solid-solution HfO2Y2O3. As shown by x-ray photoelectron spectroscopy, yttrium silicate is formed at the interface with silicon; the interfacial layer thickness increases with increasing yttrium content and increasing film thickness. The dependence of the intrinsic relative permittivity r as a function of Y content was determined. It exhibits a maximum of ~30 for ~8.8 at. % Y. The cubic phase is stable upon postdeposition high-temperature annealing at 900 °C under NH3.
Keywords: A1 Journal article; Electron microscopy for materials research (EMAT)
Impact Factor: 1.374
Times cited: 29
DOI: 10.1116/1.3106627
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