“Use of grazing emission XRF spectrometry for silicon wafer surface contamination measurements”. de Gendt S, Kenis K, Mertens PW, Heyns MM, Claes M, Van Grieken RE, Bailleul A, Knotter M, de Bokx PK, (1996)
Keywords: P3 Proceeding; AXES (Antwerp X-ray Analysis, Electrochemistry and Speciation)
