Home
<<
1
>>
List View
|
Citations
|
Details
Records
Author
Neyts, E.
;
Yan, M.
;
Bogaerts, A.
;
Gijbels, R.
Title
Particle-in-cell/Monte Carlo simulations of a low-pressure capacitively coupled radio-frequency discharge: effect of adding H
2
to an Ar discharge
Type
A1 Journal article
Year
2003
Publication
Journal of applied physics
Abbreviated Journal
J Appl Phys
Volume
93
Issue
Pages
5025-5033
Keywords
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author
Thesis
Publisher
American Institute of Physics
Place of Publication
New York, N.Y.
Editor
Language
Wos
000182296700010
Publication Date
2003-04-17
Series Editor
Series Title
Abbreviated Series Title
Series Volume
Series Issue
Edition
ISSN
0021-8979;
ISBN
Additional Links
UA library record
;
WoS full record
;
WoS citing articles
Impact Factor
2.068
Times cited
15
Open Access
Notes
Approved
Most recent IF: 2.068; 2003 IF: 2.171
Call Number
UA @ lucian @ c:irua:44012
Serial
2562
Permanent link to this record
Author
Neyts, E.
;
Yan, M.
;
Bogaerts, A.
;
Gijbels, R.
Title
PIC-MC simulation of an RF capacitively coupled Ar/H
2
discharge
Type
A1 Journal article
Year
2003
Publication
Nuclear instruments and methods in physics research: B
Abbreviated Journal
Nucl Instrum Meth B
Volume
202
Issue
Pages
300-304
Keywords
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author
Thesis
Publisher
Place of Publication
Editor
Language
Wos
000182122500048
Publication Date
2003-03-26
Series Editor
Series Title
Abbreviated Series Title
Series Volume
Series Issue
Edition
ISSN
0168-583X;
ISBN
Additional Links
UA library record
;
WoS full record
;
WoS citing articles
Impact Factor
1.109
Times cited
8
Open Access
Notes
Approved
Most recent IF: 1.109; 2003 IF: 1.041
Call Number
UA @ lucian @ c:irua:44015
Serial
2620
Permanent link to this record