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Author
Title
Year
Publication
Volume
Times cited
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Zhang, Y.-R.
;
Gao, F.
;
Li, X.-C.
;
Bogaerts, A.
;
Wang, Y.-N.
Fluid simulation of the bias effect in inductive/capacitive discharges
2015
Journal of vacuum science and technology: A: vacuum surfaces and films
33
9
UA library record
;
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;
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