Abstract: Scaling down the size of transistors has been a trend for several decades which has led to improved transistor performance, increased transistor density and hence the overall computation power of IC chips. The trend slowed in recent years due to reliability and power consumption issues at the nanoscale. Hence strain is introduced into transistor channels that has beneficial effects on improving the mobility of charge carriers, providing an alternative pathway for enhancing transistor performance. Therefore, monitoring strain is vital for the semiconductor industry. With the recent trend of decreasing device dimensions (FinFETS ~ 10-20nm) and strain modulation being used throughout, industry needs a reliable and fast method as quality control or defect characterisation. Such a universal strain measurement method does not exist, and one relies on a combination of quantitative in-line methods and complex off-line approaches. In this thesis, I investigated TEM and Raman spectroscopy-based methodologies for strain measurement. In terms of TEM methodologies, advancements are made for the STEM moiré imaging, targeting strain spatial resolution enhancement. I introduce advanced quadrature demodulation and phase stepping interferometry applied to STEM moiré that greatly enhances the spatial resolution while providing enhanced field of view and sensitivity for strain measurement. We introduce ways to reduce scan distortions in strain maps using an alternative scan strategy called “Block scanning” and the non-linear regression applied for strain extraction. Prospects for 3D strain analysis using high-resolution tomography is also investigated which gives direct access for the full second order strain tensors calculation. Finally, we compare strain measurements from TEM techniques with inline techniques like Raman spectroscopy. Raman stress measurement involves sensitive identification of the TO and LO phonon peaks. Raman spectrum of strained Ge transistor channel consists of strongly overlapping peaks within the spectral resolution of the spectrometer. Hence, the process of deconvolution of the two peaks is rather challenging. Hence, we explore new polarisation geometries like radially polarised incoming light which was shown to ease the deconvolution problem resulting in improved precision for Raman stress–strain measurements.

Abstract: The peculiarities of sputtering processes at 0.5-5 keV Ne grazing ion bombardment of Si(001) and SiC(001) surfaces and their possible application for the surface modification have been studied by computer simulation. Sputtering yields in the primary knock-on recoil atoms regime versus the initial energy of incident ions (E(0) = 0.5-5 keV) and angle of incidence (psi = 0-30 degrees) counted from a target surface have been calculated. Comparative studies of layer-by-layer sputtering for Si(001) and SiC(001) surfaces versus the initial energy of incident ions as well as an effective sputtering and sputtering threshold are discussed.

Abstract: The precise control of skyrmionics and magnonics in magnetic materials is key to the development of novel spin-based technology and information transport applications. Essentially, the inherent stability of magnetic skyrmions (provided by their topological charge) together with their extremely small size (down to a few nanometers) and the ultralow threshold current necessary to move them in nanostructures are the main advantages of skyrmionics. Not least, magnonics offers lower power consumption compared to electronics and the excitation of high frequency (sub-100~nm wavelength) magnons makes it possible for the creation of nanometric devices for ultrafast information transport. Even though extensive research has been carried out in recent years, the precise manipulation of skyrmions and spin waves (magnons) in nanostructures is not fully mastered and needs to be addressed before making functional skyrmionic and magnonic devices. In this thesis, we reveal multiple alternatives for the manipulation of skyrmions and spin-waves in different materials, such as bulk chiral magnets, heterochiral structures, magnet-supperconductor hybrids and two-dimentional magnetic materials. We make use of a multiscale model to numerically simulate the magnetic states at each considered material, from micromagnetic to atomistic control. We first explore the different nucleation mechanisms, activation energy, and the time evolution of the skyrmion formation in chiral magnetic films, crucial for the realization of skyrmion-based devices. We show that the skyrmion lattice is formed from the conical phase progressively, most probably by the formation of chiral bobbres, followed by the cylindrical growth of individual skyrmions from the film surface. That reflects a rod-like (one-dimensional) nucleation of the skyrmion phase, with an activation barrier of several electronvolts per skyrmion for the case of MnSi (Manganese monosilicide). In addition, we reveal the interesting blinking (creation-annihilation) behavior of skyrmions close to the phase boundary between the conical and skyrmion phases, where we recall that such switching between topologically distinct states has been proposed as a bit operation for information storage. Next, we discuss the motion of ferromagnetic and antiferromagnetic skyrmions in heterochiral magnets. We report the characteristic deflection of ferromagnetic skyrmions when moving across a heterochiral interface, where the extent of such deflection is tuned by the applied spin-polarized current and the magnitude of Dzyaloshinskii-Moriya interaction. Following, we show that the antiferromagnetic skyrmion achieves much higher velocities than its ferromagnetic counterpart, yet experiences far stronger confinement in nanoengineered heterochiral tracks, which reinforces antiferromagnetic skyrmions as a favorable choice for skyrmion-based devices. After that, we study the interesting coupling of magnetic skyrmions and superconducting vortices in magnet-superconductor heterostructures. We perform numerical simulations, based on experimental observations, to demonstrate that the stray field of magnetic skyrmions can nucleate antivortices in an adjacent superconducting film, giving rise to a hybrid topological object, the skyrmion-vortex pair, which harbor promising features for skyrmionics and quantum computing applications. We then explore the manipulation of a single skyrmion-vortex pair when currents are applied into both superconducting and magnetic parts of the heterostructure, which is of importance for the facilitated skyrmion guidance in racetrack applications. Afterwards, we make use of the high tunability of magnetic parameters in two-dimensional magnetic materials to reveal the rich phase diagram of exotic magnetic configurations in magnetic monolayers with suppressed nearest-neighbour exchange, where we show that several unique cycloidal, checkerboard, row-wise and spin-ice states are stabilized by the competition between the second-nearest-neighbor exchange, Dzyaloshinskii-Moriya, and dipolar interactions. Additionally, we show the coexistence of ferromagnetic and antiferromagnetic spin-cycloids, as well as novel types of skyrmions and chiral domain walls. Finally, in the last part of the thesis, we present the spin wave properties in the two-dimensional magnetic materials CrBr$3$ and CrI$3$. Using spin-dynamics simulations parametrized from first principles, we reveal that the spin wave dispersion in such materials can be tuned in a broad range of frequencies by strain-engineering, and that a designed pattern of strain, as well as structural defects (halide vacancies) can be turned useful in the design of spin-wave guides. Lastly, we discuss the realization of magnonic crystals by moiré-periodic modulation of magnetic parameters in van der Waals heterostructures, where we show that the several nanometer small periodicities in such samples are ideal for the interference of terahertz spin waves. Recalling the wide range of possibilities for manipulating spin waves in such two-dimensional materials, we therefore suggest these systems as a front-runner for prospective terahertz magnonic applications.

Abstract: MicroRNAs (miRNAs) are small oligonucleotides (18-25 bases) that play a key role in epigenetic regulation. Since the discovery of miRNAs in 1993, their role in biological processes has been extensively investigated. By now, it has been evidenced that monitoring and detection of miRNAs can improve (early) disease diagnosis. The existing diagnostic approaches have limitations such as the need for complex multistep protocols for sample preparation, analysis, data interpretation, high cost of equipment, the need for highly qualified personnel, and high laboratory standards. As opposed to this, point-of-care biosensors and chips aim to facilitate the procedure and avoid sending samples into centralized laboratories, which saves time, reduces the chance of sample degradation, and enables analysis of patient samples in remote areas, directly at home or primary and secondary care facilities (i.e. general practitioners and specialists). The latter is essential for therapy assessment and follow-up monitoring of patients with chronic diseases and cancer. Nevertheless, the development of such sensors is lagging compared to the projections of 10 – 20 years ago, mainly due to insufficient sensitivity, poor reproducibility, and the complexity of the sensors’ design reported in the research literature. This motivates the development of new detection strategies and technologies such as photoelectrochemical sensors that combine the best features of different sensing approaches. The primary concern when developing detection technologies for miRNA is the need for a highly sensitive and selective platform. This thesis explores a novel photoelectrochemical (PEC) method that is distinctive owing to its sensitive nature and simple and robust design. Firstly, we focused on the usage of recently emerging commercial gold-sputtered electrode systems for the detection of short nucleic acid with enzymatic amplification. Importantly, cleaning such electrodes is a challenge since the standard procedures known for regular disk electrodes such as polishing cannot be employed here, since it will damage the protective layer on the electrode. However, the electrodes can be washed and pretreated chemically and/or electrochemically. Thus, a procedure to effectively clean and modify the gold-sputtered electrode has been developed, resulting in high-performance gold-sputtered nucleic acid sensors. Next, the usage of molecular photosensitizers as an alternative to enzymatic amplification has been evaluated. We took advantage of the singlet oxygen production by photosensitizers upon photoexcitation, leading to a photocurrent response due to the singlet oxygen-induced (electro)chemical conversions. Following the demonstration of the detection strategy, the analytical performance of the sensing system was evaluated using magnetic beads-based nucleic acid assay on disposable electrode platforms, with a focus to enhance the sensitivity and robustness of the technique in detecting complementary nucleic acid targets. Following the fundamental evaluation of the singlet oxygen-based PEC detection of nucleic acids, we further optimized the assay and measurement parameters and employed the sensing strategy for a polymerase chain reaction-free (PCR-free) quantification of miRNAs related to prostate cancer. By successfully detecting and quantifying low-picomolar range concentrations (< 10 pM) in plasma samples from prostate cancer patients, we successfully showed the applicability of the novel sensing strategy. We have also compared and positioned the performance of our developed PEC strategy with an existing state-of-art technique, i.e. electrochemiluminescence (ECL). Our PEC strategy performed on par with ECL, both yielding low-picomolar detection limits in serum matrices, however quicker and cheaper than ECL. Owing to the versatility of this PEC technique, the final study explored its multiplexing capability. As a starting point in this branch of the research, we have investigated two possible ways for multiplexing. To perform multiple measurements at the same time, constructing calibration plots and quantifying unknown miRNA concentrations in patient samples at the same time, we have developed a high-throughput detection with 96X multi-channel electrode systems and in-house designed and constructed 96XLED illumination sources. Secondly, to detect more than one target miRNA in a single measurement, intra-vial multiplexing where the samples were analyzed for different targets in one vial was also explored. Altogether, this thesis presents the fundamentals, development and application of a novel PEC strategy for detecting short (< 25 bases) nucleic acid sequences, in particular, miRNA. With an aim to serve as a distinctive technique to function as a clinical testing platform without any need for PCR, this work adds value to the development of nucleic acid-based sensors for miRNAs and other short-stranded nucleic acid biomarkers, and benefits in the early detection of diseases like cancer.