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Author | Stuer, C.; van Landuyt, J.; Bender, H.; Rooyackers, R.; Badenes, G. | ||||
Title | Morphology and defects in shallow trench isolation structures | Type | A1 Journal article | ||
Year | 1999 | Publication | Conference series of the Institute of Physics | Abbreviated Journal | |
Volume | 164 | Issue | Pages | 443-446 | |
Keywords | A1 Journal article; Electron microscopy for materials research (EMAT) | ||||
Abstract | |||||
Address | |||||
Corporate Author | Thesis | ||||
Publisher | Place of Publication | London | Editor | ||
Language | Wos | 000166835300094 | Publication Date | 0000-00-00 | |
Series Editor | Series Title | Abbreviated Series Title | |||
Series Volume | Series Issue | Edition | |||
ISSN | 0305-2346 | ISBN | Additional Links | UA library record; WoS full record; WoS citing articles | |
Impact Factor | Times cited | 1 | Open Access | ||
Notes | Approved | Most recent IF: NA | |||
Call Number | UA @ lucian @ c:irua:29690 | Serial | 2206 | ||
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