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Author
de Witte, H.
;
de Gendt, S.
;
Douglas, M.
;
Conard, T.
;
Kenis, K.
;
Mertens, P.W.
;
Vandervorst, W.
;
Gijbels, R.
Title
Evaluation of time-of-flight secondary ion mass spectrometry for metal contamination monitoring on wafer surfaces
Type
A1 Journal article
Year
2000
Publication
Journal of the electrochemical society
Abbreviated Journal
J Electrochem Soc
Volume
147
Issue
5
Pages
13-17
Keywords
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author
Thesis
Publisher
Place of Publication
New York, N.Y.
Editor
Language
Wos
000087075200052
Publication Date
2002-07-28
Series Editor
Series Title
Abbreviated Series Title
Series Volume
Series Issue
Edition
ISSN
0013-4651;
ISBN
Additional Links
UA library record
;
WoS full record
;
WoS citing articles
Impact Factor
3.259
Times cited
14
Open Access
Notes
Approved
Most recent IF: 3.259; 2000 IF: 2.293
Call Number
UA @ lucian @ c:irua:34073
Serial
1089
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