Deng, S.; Verbruggen, S.W.; Lenaerts, S.; Martens, J.A.; Van den Berghe, S.; Devloo-Casier, K.; Devulder, W.; Dendoover, J.; Deduytsche, D.; Detavernier, C. |
Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing |
2014 |
Journal of vacuum science and technology: A: vacuum surfaces and films |
32 |
10 |
UA library record; WoS full record; WoS citing articles |