Kalitzova, M.; Lebedev, O.I.; Zollo, G.; Gesheva, K.; Vlakhov, E.; Marinov, Y.; Ivanova, T.; |
Dynamics of nanoclustering in Te+ implanted Si after application of high frequency electromagnetic field and thermal annealing |
2008 |
Applied physics A : materials science & processing |
91 |
|
UA library record; WoS full record |