Author |
Title |
Year |
Publication |
Volume |
Times cited ![sorted by Times cited field, descending order (down)](img/sort_desc.gif) |
Additional Links |
Herrebout, D.; Bogaerts, A.; Yan, M.; Goedheer, W.; Dekempeneer, E.; Gijbels, R. |
1D fluid model for an rf methane plasma of interest in deposition of diamond-like carbon layers |
2001 |
Journal of applied physics |
90 |
83 |
UA library record; WoS full record; WoS citing articles |
Herrebout, D.; Bogaerts, A.; Goedheer, W.; Dekempeneer, E.; Gijbels, R. |
Simulation of plasma processes in plasma assisted CVD reactors |
1999 |
|
|
|
UA library record; WoS full record; |
Herrebout, D.; Bogaerts, A.; Yan, M.; Goedheer, W.; Dekempeneer, E.; Gijbels, R. |
An extended RF methane plasma 1D fluid model of interest in deposition of diamond-like carbon layers |
2000 |
|
|
|
UA library record |