Abstract: High purity porous ZnO nanopyramids with controllable properties are grown on their tips on
Si(100) substrates by means of a catalyst-free vapor phase deposition route in a wet oxygen
reaction environment. The system degree of preferential [001] orientation, as well as
nanopyramid size, geometrical shape and density distribution, can be finely tuned by varying the
growth temperature between 300 and 400°C, whereas higher temperatures lead to more compact
systems with a three-dimensional (3D) morphology. A growth mechanism of the obtained ZnO
nanostructures based on a self-catalytic vapor-solid (VS) mode is proposed, in order to explain
the evolution of nanostructure morphologies as a function of the adopted process conditions. The
results obtained by a thorough chemico-physical characterization enable to get an improved
control over the properties of ZnO nanopyramids grown by this technique. Taken together, they
are of noticeable importance not only for fundamental research on ZnO nanomaterials with
controlled nano-organization, but also to tailor ZnO functionalities in view of various potential
applications.