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Author
Yan, M.
;
Bogaerts, A.
;
Goedheer, W.J.
;
Gijbels, R.
Title
Electron energy distribution function in capacitively coupled RF discharges: differences between electropositive Ar and electronegative SiH
4
discharges
Type
A1 Journal article
Year
2000
Publication
Plasma sources science and technology
Abbreviated Journal
Plasma Sources Sci T
Volume
9
Issue
Pages
583-591
Keywords
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author
Thesis
Publisher
Institute of Physics
Place of Publication
Bristol
Editor
Language
Wos
000165341000015
Publication Date
2002-08-25
Series Editor
Series Title
Abbreviated Series Title
Series Volume
Series Issue
Edition
ISSN
0963-0252;1361-6595;
ISBN
Additional Links
UA library record
;
WoS full record
;
WoS citing articles
Impact Factor
3.302
Times cited
21
Open Access
Notes
Approved
Most recent IF: 3.302; 2000 IF: 1.963
Call Number
UA @ lucian @ c:irua:34071
Serial
929
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