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Author | Tokei, Z.; Lanckmans, F.; van den Bosch, G.; Van Hove, M.; Maex, K.; Bender, H.; Hens, S.; van Landuyt, J. | ||||
Title | Reliability of copper dual damascene influenced by pre-clean | Type | P1 Proceeding | ||
Year | 2002 | Publication | Analysis Of Integrated Circuits | Abbreviated Journal | |
Volume | Issue | Pages | 118-123 | ||
Keywords | P1 Proceeding; Electron microscopy for materials research (EMAT) | ||||
Abstract | |||||
Address | |||||
Corporate Author | Thesis | ||||
Publisher | Ieee | Place of Publication | New york | Editor | |
Language | Wos | 000177689400022 | Publication Date | 2003-06-25 | |
Series Editor | Series Title | Abbreviated Series Title | |||
Series Volume | Series Issue | Edition | |||
ISSN | ISBN | Additional Links | UA library record; WoS full record; WoS citing articles | ||
Impact Factor | Times cited | 5 | Open Access | ||
Notes | Conference name: | Approved | Most recent IF: NA | ||
Call Number | UA @ lucian @ c:irua:104170 | Serial | 2865 | ||
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