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Title
Year
Publication
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de Bleecker, K.
;
Herrebout, D.
;
Bogaerts, A.
;
Gijbels, R.
;
Descamps, P.
One-dimensional modelling of a capacitively coupled rf plasma in silane/helium, including small concentrations of O
2
and N
2
2003
Journal of physics: D: applied physics
36
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