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Author
Title
Year
Publication
Volume
Times cited
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De Gryse, O.
;
Clauws, P.
;
Rossou, L.
;
van Landuyt, J.
;
Vanhellemont, J.
Accurate infrared absorption measurement of interstitial and precipitated oxygen in p
+
silicon wafers
1999
Microelectronic engineering
45
UA library record
;
WoS full record
