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Author
Herrebout, D.
;
Bogaerts, A.
;
Yan, M.
;
Gijbels, R.
;
Goedheer, W.
;
Vanhulsel, A.
Title
Modeling of a capacitively coupled radio-frequency methane plasma: comparison between a one-dimensional and a two-dimensional fluid model
Type
A1 Journal article
Year
2002
Publication
Journal of applied physics
Abbreviated Journal
J Appl Phys
Volume
92
Issue
5
Pages
2290-2295
Keywords
A1 Journal article; Plasma Lab for Applications in Sustainability and Medicine – Antwerp (PLASMANT)
Abstract
Address
Corporate Author
Thesis
Publisher
American Institute of Physics
Place of Publication
New York, N.Y.
Editor
Language
Wos
000177548500011
Publication Date
2002-09-18
Series Editor
Series Title
Abbreviated Series Title
Series Volume
Series Issue
Edition
ISSN
0021-8979;
ISBN
Additional Links
UA library record
;
WoS full record
;
WoS citing articles
Impact Factor
2.068
Times cited
15
Open Access
Notes
Approved
Most recent IF: 2.068; 2002 IF: 2.281
Call Number
UA @ lucian @ c:irua:40188
Serial
2113
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