| Author |
Title |
Year |
Publication |
Volume |
Times cited |
Additional Links |
| Zhao, S.-X.; Gao, F.; Wang, Y.-N.; Bogaerts, A. |
The effect of F2 attachment by low-energy electrons on the electron behaviour in an Ar/CF4 inductively coupled plasma |
2012 |
Plasma sources science and technology |
21 |
23 |
UA library record; WoS full record; WoS citing articles |
| Liu, Y.-X.; Zhang, Q.-Z.; Liu, L.; Song, Y.-H.; Bogaerts, A.; Wang, Y.-N. |
Electron bounce resonance heating in dual-frequency capacitively coupled oxygen discharges |
2013 |
Plasma sources science and technology |
22 |
20 |
UA library record; WoS full record; WoS citing articles |
| Yan, M.; Bogaerts, A.; Goedheer, W.J.; Gijbels, R. |
Electron energy distribution function in capacitively coupled RF discharges: differences between electropositive Ar and electronegative SiH4 discharges |
2000 |
Plasma sources science and technology |
9 |
21 |
UA library record; WoS full record; WoS citing articles |
| Van Laer, K.; Tinck, S.; Samara, V.; de Marneffe, J.F.; Bogaerts, A. |
Etching of low-k materials for microelectronics applications by means of a N2/H2 plasma : modeling and experimental investigation |
2013 |
Plasma sources science and technology |
22 |
13 |
UA library record; WoS full record; WoS citing articles |
| Kozák, T.; Bogaerts, A. |
Evaluation of the energy efficiency of CO2 conversion in microwave discharges using a reaction kinetics model |
2015 |
Plasma sources science and technology |
24 |
100 |
UA library record; WoS full record; WoS citing articles |
| Zhao, S.-X.; Gao, F.; Wang, Y.-N.; Bogaerts, A. |
Gas ratio effects on the Si etch rate and profile uniformity in an inductively coupled Ar/CF4 plasma |
2013 |
Plasma sources science and technology |
22 |
11 |
UA library record; WoS full record; WoS citing articles |
| Zhang, Q.-Z.; Liu, Y.-X.; Jiang, W.; Bogaerts, A.; Wang, Y.-N. |
Heating mechanism in direct current superposed single-frequency and dual-frequency capacitively coupled plasmas |
2013 |
Plasma sources science and technology |
22 |
9 |
UA library record; WoS full record; WoS citing articles |
| Bogaerts, A.; Okhrimovskyy, A.; Baguer, N.; Gijbels, R. |
Hollow cathode discharges with gas flow: numerical modelling for the effect on the sputtered atoms and the deposition flux |
2005 |
Plasma sources science and technology |
14 |
9 |
UA library record; WoS full record; WoS citing articles |
| Bogaerts, A.; Gijbels, R. |
The ion- and atom-induced secondary electron emission yield: numerical study for the effect of clean and dirty cathode surfaces |
2002 |
Plasma sources science and technology |
11 |
51 |
UA library record; WoS full record; WoS citing articles |
| Tinck, S.; Boullart, W.; Bogaerts, A. |
Modeling Cl2/O2/Ar inductively coupled plasmas used for silicon etching : effects of SiO2 chamber wall coating |
2011 |
Plasma sources science and technology |
20 |
22 |
UA library record; WoS full record; WoS citing articles |
| Georgieva, V.; Bogaerts, A. |
Plasma characteristics of an Ar/CF4/N2 discharge in an asymmetric dual frequency reactor: numerical investigation by a PIC/MC model |
2006 |
Plasma sources science and technology |
15 |
35 |
UA library record; WoS full record; WoS citing articles |
| Van Gaens, W.; Bogaerts, A. |
Reaction pathways of biomedically active species in an Ar plasma jet |
2014 |
Plasma sources science and technology |
23 |
34 |
UA library record; WoS full record; WoS citing articles |
| Oleshko, V.P.; Gijbels, R.H.; Jacob, W.A. |
Reduction of composite Ag(Br,I) grains as studied by AEM and digital image analysis techniques |
1998 |
|
|
|
UA library record; WoS full record; |
| Kozák, T.; Bogaerts, A. |
Splitting of CO2 by vibrational excitation in non-equilibrium plasmas : a reaction kinetics model |
2014 |
Plasma sources science and technology |
23 |
170 |
UA library record; WoS full record; WoS citing articles |
| Oleshko, V.P.; van Daele, A.J.; Gijbels, R.H.; Jacob, W.A. |
Study of electron excitations in Ag(Br,I) nanocrystals by cryo-AEM techniques |
1998 |
|
|
|
UA library record; WoS full record; |
| Gijbels, R. |
The many faces of TOF-SIMS for the characterization of solid (sub)surfaces |
2003 |
|
|
|
UA library record |
| Adelmann, C.; Wen, L.G.; Peter, A.P.; Pourtois, G.; et al. |
Alternative metals for advanced interconnects |
2014 |
2014 Ieee International Interconnect Technology Conference / Advanced Metallization Conference (iitc/amc) |
|
|
UA library record; WoS full record; |
| Sankaran, K.; Clima, S.; Mees, M.; Adelmann, C.; Tokei, Z.; Pourtois, G. |
Exploring alternative metals to Cu and W for interconnects : an ab initio Insight |
2014 |
2014 Ieee International Interconnect Technology Conference / Advanced Metallization Conference (iitc/amc) |
|
|
UA library record; WoS full record; |
| van Vaeck, L.; van Espen, P.; Gijbels, R.; Baykut, G.; Laukien, F.H. |
A new electrostatic transfer line for improved transmission in Fourier transform laser microprobe mass spectrometry with external ion source |
2000 |
European mass spectrometry |
6 |
10 |
UA library record; WoS full record; WoS citing articles |
| Adams, F.; Gijbels, R.; Van Grieken, R.; Dachang, Z. |
Inorganic mass spectrometry |
1993 |
|
|
|
UA library record |
| Adams, F.; Gijbels, R.; van Grieken, R.; Kim, Y.-sang |
Inorganic mass spectrometry |
1999 |
|
|
|
UA library record |
| van Vaeck, L.; Gijbels, R. |
Identification des substances inorganiques et organiques en surface des solides par la microsonde laser |
1992 |
|
|
|
UA library record |
| Zhang, H.; Wang, W.; Li, X.; Han, L.; Yan, M.; Zhong, Y.; Tu, X. |
Plasma activation of methane for hydrogen production in a N2 rotating gliding arc warm plasma : a chemical kinetics study |
2018 |
Chemical engineering journal |
345 |
25 |
UA library record; WoS full record; WoS citing articles |
| de Witte, H.; Conard, T.; Vandervorst, W.; Gijbels, R. |
Ion-bombardment artifact in TOF-SIMS analysis of ZrO2/SiO2/Si stacks |
2003 |
Applied surface science |
203 |
15 |
UA library record; WoS full record; WoS citing articles |
| Verlinden, G.; Gijbels, R.; Geuens, I.; de Keyzer, R. |
Chemical surface characterization of complex AgX microcrystals by imaging TOF-SIMS and dual beam depth profiling |
2000 |
|
|
|
UA library record |
| Janssens, K.; Bogaerts, A.; van Grieken, R. |
Colloquium Spectroscopicum Internationale 34: a collection of papers presented at the Colloquium Spectroscopicum Internationale, Antwerp, Belgium, 4-9 September 2005 |
2006 |
|
|
|
UA library record |
| Bogaerts, A.; Janssens, K.; van Grieken, R. |
Colloquium Spectroscopicum Internationale 34 (CSI 34), Antwerp, Belgium, 4-9 September 2005 |
2006 |
|
|
|
UA library record |
| Shazali, I.; Van 't dack, L.; Gijbels, R. |
Preconcentration of precious metals by tellurium sulphide fire-assay followed by instrumental neutron activation analysis |
1988 |
|
|
|
UA library record |
| de Witte, H.; Conard, T.; Vandervorst, W.; Gijbels, R. |
Study of oxynitrides with dual beam TOF-SIMS |
2000 |
|
|
|
UA library record |
| Lenaerts, J.; Verlinden, G.; van Vaeck, L.; Gijbels, R.; Geuens, I. |
TOF-SIMS analysis of carbocyanine dyes adsorbed on silver substrates |
2000 |
|
|
|
UA library record |
