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Author Title Year Publication (up) Volume Times cited Additional Links
Yan, M.; Bogaerts, A.; Gijbels, R.; Goedheer, W.J. Spatial behavior of energy relaxation of electrons in capacitively coupled discharges: comparison between Ar and SiH4 2000 Journal of applied physics 87 14 UA library record; WoS full record; WoS citing articles